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"19" }, { "canonical": { "q": 68, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "l/s", "value": "68" }, { "key": "starting_pressure_max", "sources": [ { "page": "13", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Torr", "value": "1 x 10^-3" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-11" }, { "key": "voltage", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Vdc", "value": "7000" } ] }, { "brand": "Agilent Technologies Vacuum", "brandId": "brand:agilent", "family": "fam:ion-star", "id": "pump:agilent-vacion-plus-75-starcell", "lifecycleState": "unknown", "name": "VacIon Plus 75 StarCell", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "°C", "value": "0 to +85" }, { "key": "cathode_material", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "text", "value": "Titanium" }, { "key": "magnet_type", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "text", "value": "Ferrite" }, { "key": "mass", "sources": [ { "page": "17", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "kg", "value": "19" }, { "canonical": { "q": 65, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "l/s", "value": "65" }, { "key": "starting_pressure_max", "sources": [ { "page": "13", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Torr", "value": "5 x 10^-2" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-11" }, { "key": "voltage", "sources": [ { "page": "16", "source": "src:agilent-vacion-plus-40-55-75-manual-idealvac" } ], "unitPrinted": "Vdc", "value": "-7000" } ] }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-hybrid", "id": "pump:balzers-tmh-520", "lifecycleState": "eol_unsupported", "name": "TMH 520", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "value": "Standard: water cooling. Alternative: air cooling (accessory)." }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "kg", "value": "12.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar", "value": "16" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar l/s", "value": "3" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "W", "value": "10.5" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "1/min", "value": "50000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t3-tmh520tmu" } ], "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar", "value": "< 1·10^-8 mbar" } ] }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-hybrid", "id": "pump:balzers-tmu-261-p", "lifecycleState": "eol_supported", "name": "TMU 261 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "8", "source": "src:t2-tmu261p" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C (up to +35 °C with air cooling)" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:t2-tmu261p" } ], "value": "ceramic ball bearing (fore-vacuum side)" }, { "key": "compression_he", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "3·10^5" }, { "key": "compression_n2", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": ">1·10^9" }, { "key": "cooling", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "Water, air" }, { "key": "inlet_flange", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "TL011" }, { "key": "magnetic_field_max", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "kg", "value": "8.1" }, { "key": "max_foreline_pressure", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "mbar l/s", "value": "7" }, { "key": "noise_level", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "dB(A)", "value": "50" }, { "key": "power_max", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "W", "value": "200" }, { "canonical": { "q": 175, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "l/s", "value": "175" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "rotation_speed", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:t2-tmu261p" } ], "value": "3 years" }, { "key": "startup_time", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "min", "value": "1.6" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "unitPrinted": "mbar", "value": "< 5·10-10 mbar" }, { "key": "venting_flange", "sources": [ { "page": "34", "source": "src:t2-tmu261p" } ], "value": "G 1/8''" } ] }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-hybrid", "id": "pump:balzers-tmu-520", "lifecycleState": "eol_unsupported", "name": "TMU 520", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "value": "Standard: water cooling. Alternative: air cooling (accessory)." }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "kg", "value": "12.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar", "value": "16" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar l/s", "value": "3" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "W", "value": "10.5" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "1/min", "value": "50000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t3-tmh520tmu" } ], "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 4.9999999999999995e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t3-tmh520tmu" } ], "unitPrinted": "mbar", "value": "< 5·10^-11 mbar" } ] }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-hybrid", "id": "pump:balzers-tph-062", "lifecycleState": "eol_unsupported", "name": "TPH 062", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "ratio", "value": "6 x 10^2" }, { "key": "compression_he", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "ratio", "value": "7 x 10^3" }, { "key": "compression_n2", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "ratio", "value": "1 x 10^8" }, { "key": "cooling", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "text", "value": "Konvektion / Convection" }, { "key": "inlet_flange", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "text", "value": "DN 40 ISO-KF" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t3-tphu6255" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "kg", "value": "3.6" }, { "key": "mounting_orientation", "sources": [ { "page": "3", "source": "src:t3-tphu6255" } ], "unitPrinted": "text", "value": "vertikal bis horizontal / vertical to horizontal" }, { "canonical": { "q": 34, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "l/s", "value": "34" }, { "canonical": { "q": 40, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "l/s", "value": "40" }, { "canonical": { "q": 30, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "l/s", "value": "30" }, { "key": "rotation_speed", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "startup_time", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "min", "value": "2" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "9", "source": "src:t3-tphu6255" } ], "unitPrinted": "mbar", "value": "<1 x 10^-10" } ], "series": "TPH/TPU" }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-classic", "id": "pump:balzers-tph-2200", "lifecycleState": "eol_unsupported", "name": "TPH 2200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "°C", "value": "0–50" }, { "key": "compression_h2", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": "2·10^3" }, { "key": "compression_he", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": "4·10^4" }, { "key": "compression_n2", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": "10^8" }, { "key": "cooling", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": "DN 250 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "39", "source": "src:t3-tph-tpu2200" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "mT", "value": "13.4" }, { "key": "mass", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "kg", "value": "75" }, { "key": "max_foreline_pressure", "sources": [ { "page": "25", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "mbar", "value": "0.1" }, { "key": "max_gas_throughput", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "mbar l/s", "value": "12" }, { "canonical": { "q": 2800, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "l/s", "value": "2800" }, { "canonical": { "q": 3200, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "l/s", "value": "3200" }, { "canonical": { "q": 2200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "l/s", "value": "2200" }, { "key": "rotation_speed", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "1/min", "value": "36000" }, { "key": "service_interval", "sources": [ { "page": "28", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "h", "value": "5000" }, { "key": "startup_time", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "min", "value": "16" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "mbar", "value": "< 1·10^-10" } ] }, { "brand": "Balzers", "brandId": "brand:balzers", "family": "fam:tmp-classic", "id": "pump:balzers-tpu-2200", "lifecycleState": "eol_unsupported", "name": "TPU 2200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t3-tph-tpu2200" } ], "unitPrinted": "°C", "value": "0–50" }, { "key": "compression_h2", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": "2·10^3" }, { "key": "compression_he", "sources": [ { "page": "10", "source": "src:t3-tph-tpu2200" } ], "value": 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"source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ] }, { "brand": "CTI-Cryogenics", "brandId": "brand:cti-cryogenics", "family": "fam:cryo-gm", "id": "pump:cti-on-board-is-320fe", "lifecycleState": "unknown", "name": "On-Board IS 320FE Cryopump", "parameters": [ { "key": "mass", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "lbs.", "value": "100" }, { "canonical": { "q": 3, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "liters/sec", "value": "3,000" }, { "canonical": { "q": 12.5, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "liters/sec", "value": "12,500" }, { "canonical": { "q": 11, "unit": "l/s" }, "key": "pumping_speed_h2o", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "liters/sec", "value": "11,000" }, { "key": "refrigerator_type", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "value": "Gifford McMahan" } ], "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ] }, { "brand": "CTI-Cryogenics", "brandId": "brand:cti-cryogenics", "family": "fam:cryo-gm", "id": "pump:cti-on-board-is-8", "lifecycleState": "unknown", "name": "On-Board IS 8 Cryopump", "parameters": [ { "key": "capacity_h2", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "std. liters @ 5 x 10-6 torr", "value": "12" }, { "key": "crossover_value", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "torr-liters", "value": "150" }, { "key": "mass", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "lbs.", "value": "72" }, { "canonical": { "q": 1.2, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "liters/sec", "value": "1,200" }, { "canonical": { "q": 2.5, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "liters/sec", "value": "2,500" }, { "canonical": { "q": 4, "unit": "l/s" }, "key": "pumping_speed_h2o", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "liters/sec", "value": "4,000" }, { "canonical": { "q": 1.5, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "liters/sec", "value": "1,500" }, { "key": "refrigerator_type", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "value": "Gifford McMahan" } ], "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ] }, { "brand": "CTI-Cryogenics", "brandId": "brand:cti-cryogenics", "family": "fam:cryo-gm", "id": "pump:cti-on-board-is-8f", "lifecycleState": "unknown", "name": "On-Board IS 8F Cryopump", "parameters": [ { "key": "capacity_ar", "sources": [ { "page": null, "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" } ], "unitPrinted": "std. liters @ 5 x 10-6 torr", "value": "1000" }, { "key": "capacity_h2", "sources": [ { "page": null, "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" } ], "unitPrinted": "std. liters @ 5 x 10-6 torr", "value": "12" }, { "key": "capacity_n2", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "std. liters", "value": "550" }, { "key": "crossover_value", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "torr-liters", "value": "150" }, { "key": "mass", "sources": [ { "page": null, "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" } ], "unitPrinted": "lbs.", "value": "67" }, { "canonical": { "q": 1.2, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": null, "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" } ], "unitPrinted": "liters/sec", "value": "1,200" }, { "canonical": { "q": 2.2, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": null, "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" } ], "unitPrinted": "liters/sec", "value": "2,200" }, { "canonical": { "q": 4, "unit": "l/s" }, "key": "pumping_speed_h2o", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "unitPrinted": "liters/sec", "value": "4,000" }, { "canonical": { "q": 1.5, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": null, "source": "src:cryo-cti-on-board-is-8f-cryopump-sublime-regeneration-8040737" } ], "unitPrinted": "liters/sec", "value": "1,500" }, { "key": "refrigerator_type", "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ], "value": "Gifford McMahan" } ], "sources": [ { "page": null, "source": "src:cryo-cti-brooks-on-board-is-cryopump-install-8040596-reva" } ] }, { "brand": "CTI-Cryogenics", "brandId": "brand:cti-cryogenics", "family": "fam:cryo-gm", "id": "pump:cti-on-board-is-single-stage", "lifecycleState": "unknown", "name": "On-Board IS Single Stage Cryopump", "parameters": [], "sources": [ { "page": null, "source": "src:cryo-cti-on-board-is-single-stage-cryopump-8040731-reva" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-ext-200-h", "lifecycleState": "eol_supported", "name": "EXT 200 H", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "unitPrinted": "°C", "value": "0 - 35 °C" }, { "key": "compression_h2", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "ratio", "value": "3.5 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "ratio", "value": "1 x 10^6" }, { "key": "compression_n2", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "ratio", "value": ">5 x 10^7" }, { "key": "cooling", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "value": "Forced-air/water" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "value": "DN100ISO" }, { "key": "lubricant", "sources": [ { "page": "15", "source": "src:t2-ext200h" } ], "value": "hydrocarbon lubricant" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "kg", "value": "9 kg (7.5 kg†)" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-ext200h" } ], "unitPrinted": "mbar", "value": "12.6 mbar (1260 Pa)" }, { "key": "mounting_orientation", "sources": [ { "page": "13", "source": "src:t2-ext200h" } ], "value": "Vertical and upright through to horizontal ±2°" }, { "key": "noise_level", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "unitPrinted": "dB(A)", "value": "< 50 dB(A)" }, { "key": "power_max", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "unitPrinted": "VA", "value": "250" }, { "canonical": { "q": 163, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "l/s", "value": "163" }, { "canonical": { "q": 190, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "l/s", "value": "190" }, { "canonical": { "q": 177, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "unitPrinted": "l/s", "value": "177" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-ext200h" } ], "unitPrinted": "r/min", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t2-ext200h" } ], "unitPrinted": "hours", "value": "typically more than 20000 hours" }, { "key": "startup_time", "sources": [ { "page": "14", "source": "src:t2-ext200h" } ], "unitPrinted": "sec", "value": "110" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-ext200h" } ], "value": "1/8 inch BSP" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-ext-250-m", "lifecycleState": "eol_supported", "name": "EXT250M", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "C", "value": "0 - 35 C" }, { "key": "bake_temp_max", "sources": [ { "page": "12", "source": "src:t2-ext250m" } ], "unitPrinted": "C", "value": "100" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "frictionless passive magnetic bearings (radial, both shaft ends) + active electromagnetic bearing (axial)" }, { "key": "compression_h2", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "1500" }, { "key": "compression_he", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "2 x 10^4" }, { "key": "compression_n2", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": ">1 x 10^8" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "free convection / forced air / water" }, { "key": "inlet_flange", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "DN100CF/DN100ISO-K" }, { "key": "lubricant", "sources": [ { "page": "17", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "oil-free" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-ext250m" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "kg", "value": "11 kg (DN100CF)/8.5 kg (DN100ISO-K)" }, { "key": "mounting_orientation", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "any orientation" }, { "key": "noise_level", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "dBA", "value": "< 50 dBA" }, { "canonical": { "q": 190, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "l/s", "value": "190" }, { "canonical": { "q": 250, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "l/s", "value": "250" }, { "canonical": { "q": 240, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "l/s", "value": "240" }, { "key": "purge_flange", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "NW10" }, { "key": "rotation_speed", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "r/min", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "32", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "no routine maintenance" }, { "key": "standby_power", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "W", "value": "15" }, { "key": "startup_time", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "s", "value": "90" }, { "canonical": { "bound": "less_than", "q": 5e-9, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "mbar", "value": "<5 x 10-9 mbar, <5 x 10-7 Pa" }, { "key": "venting_flange", "sources": [ { "page": "15", "source": "src:t2-ext250m" } ], "unitPrinted": "text", "value": "1/8-inch BSP female" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-ext-70", "lifecycleState": "eol_supported", "name": "EXT70", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "°C", "value": "0-35" }, { "key": "bearing_type", "sources": [ { "page": "2", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Hybrid bearing arrangement: permanent-magnet upper bearing, oil or grease lubricated ceramic lower bearing" }, { "key": "compression_h2", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "500" }, { "key": "compression_he", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "6000" }, { "key": "compression_n2", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": ">1×10^8" }, { "key": "cooling", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Free convection or forced air, or water" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "DN40NW, DN50NW, DN63CF or DN63ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "kg", "value": "1.5" }, { "key": "mounting_orientation", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Vertical and upright, through to horizontal" }, { "key": "noise_level", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "dB(A)", "value": "<50" }, { "key": "power_max", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "W", "value": "10" }, { "canonical": { "q": 50, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "50" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "60" }, { "canonical": { "q": 65, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "65" }, { "key": "rotation_speed", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "rpm", "value": "90000" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "s", "value": "90" }, { "canonical": { "bound": "less_than", "q": 5e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-ext" } ], "unitPrinted": "mbar", "value": "<5×10-9" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-ext-75dx", "lifecycleState": "eol_supported", "name": "EXT75DX", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "°C", "value": "5-35" }, { "key": "bearing_type", "sources": [ { "page": "2", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Hybrid bearing arrangement: permanent-magnet upper bearing, oil or grease lubricated ceramic lower bearing" }, { "key": "compression_h2", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "5×10^4" }, { "key": "compression_he", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "1×10^6" }, { "key": "compression_n2", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": ">1×10^11" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Forced air / water" }, { "key": "inlet_flange", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "DN63ISO-K, DN63CF or DN40NW" }, { "key": "magnetic_field_max", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "kg", "value": "3" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "text", "value": "Vertical and upright, through to horizontal" }, { "key": "noise_level", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "dB(A)", "value": "<50" }, { "key": "power_max", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "W", "value": "10" }, { "canonical": { "q": 53, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "53" }, { "canonical": { "q": 57, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "57" }, { "canonical": { "q": 61, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "l/s", "value": "61" }, { "key": "rotation_speed", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "rpm", "value": "90000" }, { "key": "startup_time", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "s", "value": "110" }, { "canonical": { "bound": "less_than", "q": 5e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-ext" } ], "unitPrinted": "mbar", "value": "<5×10-9" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-ext255h", "lifecycleState": "eol_supported", "name": "EXT255H", "parameters": [], "series": "EXT", "sources": [ { "page": "1", "source": "src:tf-edwards-ext255h-manual" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-next-240", "lifecycleState": "active", "name": "nEXT 240", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "36", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "5 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "75" }, { "key": "compression_h2", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "1 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "3 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "> 1 x 10^11" }, { "key": "inlet_flange", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "DN100 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "unitPrinted": "kg", "value": "5.7" }, { "key": "max_foreline_pressure", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mbar", "value": "9.5" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "sccm", "value": "45" }, { "key": "noise_level", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "dB(A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "11", "source": "src:ptb-edwards-next" } ], "unitPrinted": "W", "value": "200" }, { "canonical": { "q": 165, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "165" }, { "canonical": { "q": 230, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "230" }, { "canonical": { "q": 240, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "240" }, { "key": "purge_flange", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" }, { "key": "rotation_speed", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "75", "source": "src:ptb-edwards-next" } ], "unitPrinted": "hours", "value": "35000" }, { "key": "startup_time", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "sec", "value": "115" }, { "canonical": { "bound": "less_than", "q": 6.000000000000001e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mbar", "value": "< 6 x 10^-8" }, { "key": "venting_flange", "sources": [ { "page": "18", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-next-300", "lifecycleState": "active", "name": "nEXT 300", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "36", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "5 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "80" }, { "key": "compression_h2", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "5 x 104" }, { "key": "compression_he", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "1 x 106" }, { "key": "compression_n2", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": ">1 x 1011" }, { "key": "inlet_flange", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "DN100ISO-K" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:ptb-edwards-next" } ], "value": "hydrocarbon lubricant" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "kg", "value": "5.7" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "sccm", "value": "95" }, { "key": "mounting_orientation", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "value": "vertical a horizontal ± 2°" }, { "key": "noise_level", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "dB(A)", "value": "<45" }, { "key": "power_max", "sources": [ { "page": "59", "source": "src:ptb-edwards-next" } ], "unitPrinted": "W", "value": "200" }, { "canonical": { "q": 280, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "280" }, { "canonical": { "q": 340, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "340" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "purge_flange", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" }, { "key": "rotation_speed", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "75", "source": "src:ptb-edwards-next" } ], "unitPrinted": "h", "value": ">17500" }, { "key": "startup_time", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "s", "value": "155" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mbar", "value": "<5 x 10-10" }, { "key": "venting_flange", "sources": [ { "page": "19", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-next-400", "lifecycleState": "active", "name": "nEXT 400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "36", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "5 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "°C", "value": "70" }, { "key": "compression_h2", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "5 x 105" }, { "key": "compression_he", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "1 x 108" }, { "key": "compression_n2", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": ">1 x 1011" }, { "key": "inlet_flange", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "DN160ISO-K" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:ptb-edwards-next" } ], "value": "hydrocarbon lubricant" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "kg", "value": "6.5" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "sccm", "value": "105" }, { "key": "mounting_orientation", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "value": "vertical a horizontal ± 2°" }, { "key": "noise_level", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "dB(A)", "value": "<45" }, { "key": "power_max", "sources": [ { "page": "59", "source": "src:ptb-edwards-next" } ], "unitPrinted": "W", "value": "200" }, { "canonical": { "q": 325, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "325" }, { "canonical": { "q": 390, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "390" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "l/s", "value": "400" }, { "key": "purge_flange", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" }, { "key": "rotation_speed", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "75", "source": "src:ptb-edwards-next" } ], "unitPrinted": "h", "value": ">17500" }, { "key": "startup_time", "sources": [ { "page": "21", "source": "src:ptb-edwards-next" } ], "unitPrinted": "s", "value": "175" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "unitPrinted": "mbar", "value": "<1 x 10-10" }, { "key": "venting_flange", "sources": [ { "page": "20", "source": "src:ptb-edwards-next" } ], "value": "1/8 inch BSPP" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-hybrid", "id": "pump:edwards-next300d", "lifecycleState": "active", "name": "nEXT300D", "parameters": [], "series": "nEXT", "sources": [ { "page": "1", "source": "src:tf-edwards-next300d-manual" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-301", "lifecycleState": "eol_supported", "name": "STP-301", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "20", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "2 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "5 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "10^8" }, { "key": "cooling", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Natural air cooling (Water/air cooling: for baking/gas suction)" }, { "key": "inlet_flange", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "ICF152/VG100/ISO10" }, { "key": "lubricant", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "25", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "15 mT (150 G) axial, 3 mT (30 G) radial" }, { "key": "mass", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "kg", "value": "11" }, { "key": "max_foreline_pressure", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "13 Pa (0.1 Torr)" }, { "key": "mounting_orientation", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 280, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "280" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "rotation_speed", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "rpm", "value": "25,000 to 48,000" }, { "key": "startup_time", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "min", "value": "3" }, { "canonical": { "q": 1e-10, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "10^-8 Pa (10^-10 Torr)" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-451", "lifecycleState": "eol_supported", "name": "STP-451", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "20", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "2 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "5 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "10^8" }, { "key": "cooling", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Natural air cooling (Water/air cooling: for baking/gas suction)" }, { "key": "inlet_flange", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "ICF203/VG150/ISO16" }, { "key": "lubricant", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "25", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "15 mT (150 G) axial, 3 mT (30 G) radial" }, { "key": "mass", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "kg", "value": "12" }, { "key": "max_foreline_pressure", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "13 Pa (0.1 Torr)" }, { "key": "mounting_orientation", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 460, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "460" }, { "canonical": { "q": 460, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "460" }, { "canonical": { "q": 480, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "l/s", "value": "480" }, { "key": "rotation_speed", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "rpm", "value": "25,000 to 48,000" }, { "key": "startup_time", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "min", "value": "3" }, { "canonical": { "q": 1e-10, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "112", "source": "src:t2-stp301-451" } ], "unitPrinted": "text", "value": "10^-8 Pa (10^-10 Torr)" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-a1303", "lifecycleState": "active", "name": "STP-A1303", "parameters": [], "series": "STP", "sources": [ { "page": "1", "source": "src:tf-edwards-stp-a1303-manual" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-a1603c", "lifecycleState": "active", "name": "STP-A1603C", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:ptb-edwards-stpa1603c" } ], "value": "magnetic bearing" }, { "key": "compression_h2", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "7×103" }, { "key": "compression_n2", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": ">108" }, { "key": "cooling", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "ISO200F/VG200/ICF253" }, { "key": "lubricant", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "kg", "value": "35" }, { "key": "max_foreline_pressure", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "Pa", "value": "266" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "Pa·m3/s", "value": "4.2" }, { "key": "mounting_orientation", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 1200, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "L/s", "value": "1200" }, { "canonical": { "q": 1600, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "L/s", "value": "1600" }, { "key": "purge_flange", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "Pa·m3/s", "value": "3.4×10-2 to 8.4×10-2" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "rpm", "value": "36500" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "min", "value": "7" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:ptb-edwards-stpa1603c" } ], "unitPrinted": "Pa", "value": "10-7" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-f2203c", "lifecycleState": "active", "name": "STP-F2203C", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": "magnetic bearing" }, { "key": "compression_h2", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": ">103" }, { "key": "compression_n2", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": ">108" }, { "key": "cooling", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": "Water cooling" }, { "key": "lubricant", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "kg", "value": "61" }, { "key": "max_foreline_pressure", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "Pa", "value": "500" }, { "key": "mounting_orientation", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 1200, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "L/s", "value": "1200" }, { "canonical": { "q": 2200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "L/s", "value": "2200" }, { "key": "purge_flange", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "Pa·m3/s", "value": "3.4×10-2 to 8.4×10-2" }, { "key": "rotation_speed", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "startup_time", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "min", "value": "7" }, { "canonical": { "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "8", "source": "src:ptb-edwards-stp-f2203c" } ], "unitPrinted": "Pa", "value": "10-6" } ] }, { "brand": "Edwards", "brandId": "brand:edwards", "family": "fam:tmp-maglev", "id": "pump:edwards-stp-ix455", "lifecycleState": "active", "name": "STP-iX455", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "5 axis free-controlled magnetic bearing" }, { "key": "compression_h2", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "1×104" }, { "key": "compression_n2", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": ">108" }, { "key": "cooling", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "Natural air cooling" }, { "key": "lubricant", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "mGauss", "value": "≦100" }, { "key": "mass", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "kg", "value": "16" }, { "key": "max_foreline_pressure", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "Pa", "value": "67" }, { "key": "mounting_orientation", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "dB", "value": "<50" }, { "key": "power_max", "sources": [ { "page": "128", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "A", "value": "5" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "L/s", "value": "300" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "L/s", "value": "300" }, { "key": "rotation_speed", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "rpm", "value": "55000" }, { "key": "startup_time", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "min", "value": "≦6" }, { "canonical": { "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "127", "source": "src:ptb-edwards-stp-ix455" } ], "unitPrinted": "Pa", "value": "10-8" } ] }, { "brand": "Gamma Vacuum", "brandId": "brand:gamma-vacuum", "family": "fam:ion-diode", "id": "pump:gamma-titan-5s", "lifecycleState": "unknown", "name": "TiTan 5S CV", "parameters": [ { "key": "bake_temp_max_without_magnets", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "°C", "value": "450" }, { "key": "cathode_material", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "100% Titanium" }, { "key": "inlet_flange", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "DN 35 (2.75 in.) CFR" }, { "key": "magnet_type", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "rare earth" }, { "key": "mass", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "kg", "value": "2.3" }, { "key": "operating_life_at_reference_pressure", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "hours", "value": "50000" }, { "canonical": { "q": 5, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "l/s", "value": "5" }, { "canonical": { "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "mbar", "value": "1e-11" } ] }, { "brand": "Gamma Vacuum", "brandId": "brand:gamma-vacuum", "family": "fam:ion-noble-diode", "id": "pump:gamma-titan-5s-di", "lifecycleState": "unknown", "name": "TiTan 5S DI", "parameters": [ { "key": "bake_temp_max_without_magnets", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "°C", "value": "450" }, { "key": "cathode_material", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "50% Titanium / 50% Tantalum" }, { "key": "inlet_flange", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "DN 35 (2.75 in.) CFR" }, { "key": "magnet_type", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "n/a", "value": "rare earth" }, { "key": "mass", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "kg", "value": "2.3" }, { "key": "operating_life_at_reference_pressure", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "hours", "value": "50000" }, { "canonical": { "q": 2, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "l/s", "value": "2" }, { "key": "starting_pressure_max", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "mbar", "value": "0.0001" }, { "canonical": { "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "2", "source": "src:gamma-titan-5s-datasheet-highvacdepot" } ], "unitPrinted": "mbar", "value": "1e-11" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:ion-diode", "id": "pump:leybold-iz-100", "lifecycleState": "eol_unsupported", "name": "IZ100", "parameters": [ { "key": "ambient_humidity_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "%", "value": "< 85" }, { "key": "ambient_temp_range", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "0 to +40" }, { "key": "degassing_heater_power_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "W", "value": "320" }, { "key": "degassing_heater_voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "V AC", "value": "220 - 240" }, { "key": "degassing_temp_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "350" }, { "key": "degassing_temp_with_internal_heater", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "250" }, { "key": "dimensions_wdh", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mm", "value": "337 x 167 x 340" }, { "key": "mass", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kg", "value": "37" }, { "key": "operating_pressure_recommended", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 5.0 x 10-5" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 100, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "100" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 10-11" }, { "key": "voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kV", "value": "7.5" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:ion-diode", "id": "pump:leybold-iz-200", "lifecycleState": "eol_unsupported", "name": "IZ200", "parameters": [ { "key": "ambient_humidity_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "%", "value": "< 85" }, { "key": "ambient_temp_range", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "0 to +40" }, { "key": "degassing_heater_power_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "W", "value": "600" }, { "key": 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"source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "105" }, { "canonical": { "q": 200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "200" }, { "canonical": { "bound": "less_than", "q": 1e-12, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 10-12" }, { "key": "voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kV", "value": "7.5" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:ion-diode", "id": "pump:leybold-iz-30", "lifecycleState": "eol_unsupported", "name": "IZ30", "parameters": [ { "key": "ambient_humidity_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "%", "value": "< 85" }, { "key": "ambient_temp_range", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "0 to +40" }, { "key": "degassing_temp_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "350" }, { "key": "dimensions_wdh", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mm", "value": "183 x 103 x 187" }, { "key": "mass", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kg", "value": "9.5" }, { "key": "operating_pressure_recommended", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 8.0 x 10-5" }, { "canonical": { "q": 10, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "10" }, { "canonical": { "q": 30, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "30" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 10-11" }, { "key": "voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kV", "value": "7.5" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:ion-diode", "id": "pump:leybold-iz-400", "lifecycleState": "eol_unsupported", "name": "IZ400", "parameters": [ { "key": "ambient_humidity_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "%", "value": "< 85" }, { "key": "ambient_temp_range", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "0 to +40" }, { "key": "degassing_heater_power_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "W", "value": "800" }, { "key": "degassing_heater_voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "V AC", "value": "220 - 240" }, { "key": "degassing_temp_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "350" }, { "key": "degassing_temp_with_internal_heater", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "250" }, { "key": "dimensions_wdh", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mm", "value": "560 x 296 x 372" }, { "key": "mass", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kg", "value": "124" }, { "key": "operating_pressure_recommended", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 3.0 x 10-5" }, { "canonical": { "q": 190, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "190" }, { "canonical": { "q": 360, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "360" }, { "canonical": { "bound": "less_than", "q": 1e-12, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 10-12" }, { "key": "voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kV", "value": "7.5" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:ion-diode", "id": "pump:leybold-iz-50", "lifecycleState": "eol_unsupported", "name": "IZ50", "parameters": [ { "key": "ambient_humidity_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "%", "value": "< 85" }, { "key": "ambient_temp_range", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "0 to +40" }, { "key": "degassing_heater_power_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "W", "value": "300" }, { "key": "degassing_heater_voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "V AC", "value": "220 - 240" }, { "key": "degassing_temp_max", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "350" }, { "key": "degassing_temp_with_internal_heater", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "degC", "value": "250" }, { "key": "dimensions_wdh", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mm", "value": "187 x 165 x 240" }, { "key": "mass", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kg", "value": "12" }, { "key": "operating_pressure_recommended", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 8.0 x 10-5" }, { "canonical": { "q": 15, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "15" }, { "canonical": { "q": 45, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "l/s", "value": "45" }, { "canonical": { "bound": "less_than", "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "mbar", "value": "< 10-11" }, { "key": "voltage", "sources": [ { "page": "5", "source": "src:leybold-iz-catalog-2010" } ], "unitPrinted": "kV", "value": "7.5" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-classic", "id": "pump:leybold-turbovac-1100", "lifecycleState": "eol_unsupported", "name": "TURBOVAC 1100 C", "parameters": [ { "key": "bearing_type", "sources": [ { "page": "1", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "grease-lubricated bearings" }, { "key": "cooling", "sources": [ { "page": "19", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "DN 250/200/160 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "1", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "grease" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-t1100" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "kg", "value": "22" }, { "key": "max_foreline_pressure", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "mbar", "value": "1 x 10^-1" }, { "key": "max_inlet_pressure_continuous", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "mbar", "value": "1 x 10^-2" }, { "key": "mounting_orientation", "sources": [ { "page": "18", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "18", "source": "src:t3-t1100" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "key": "outlet_flange", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "l/s", "value": "1050" }, { "key": "purge_flange", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "10 or 16 mm KF" }, { "key": "rotation_speed", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "r.p.m.", "value": "30000" }, { "key": "service_interval", "sources": [ { "page": "23", "source": "src:t3-t1100" } ], "unitPrinted": "h", "value": "10000" }, { "key": "startup_time", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "min", "value": "9" }, { "key": "venting_flange", "sources": [ { "page": "15", "source": "src:t3-t1100" } ], "unitPrinted": "text", "value": "DN 10 or 16 KF" } ], "series": "TURBOVAC", "sources": [ { "page": "1", "source": "src:t3-t1100" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-340-m", "lifecycleState": "legacy_in_service", "name": "TURBOVAC 340 M", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "°C", "value": "up to 45" }, { "key": "compression_h2", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "2.5·10^3" }, { "key": "compression_he", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "6.4·10^4" }, { "key": "compression_n2", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "> 10^9" }, { "key": "cooling", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "not required" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "DN 100 ISO-K" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "kg", "value": "16" }, { "key": "max_foreline_pressure", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "mbar", "value": "5·10^-1" }, { "key": "mounting_orientation", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "10", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 340, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "l/s", "value": "340" }, { "canonical": { "q": 370, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "l/s", "value": "370" }, { "canonical": { "q": 270, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "l/s", "value": "270" }, { "key": "purge_flange", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "DN 10 KF" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "min-1", "value": "51600" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:ptb-leybold-turbovac340" } ], "value": "not_applicable" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "min", "value": "3.5" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "unitPrinted": "mbar", "value": "< 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "7", "source": "src:ptb-leybold-turbovac340" } ], "value": "DN 10 KF" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-350i", "lifecycleState": "active", "name": "TURBOVAC 350 i", "parameters": [], "series": "TURBOVAC i", "sources": [ { "page": "10", "source": "src:tf-leybold-turbovac-350i-manual" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-classic", "id": "pump:leybold-turbovac-360", "lifecycleState": "legacy_in_service", "name": "TURBOVAC 360", "parameters": [], "series": "TURBOVAC", "sources": [ { "page": "2", "source": "src:tf-leybold-turbovac-360-manual" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-1500-c", "lifecycleState": "eol_supported", "name": "MAG 1500 C/CT DN 200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:t2-magdigital" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "10", "source": "src:t2-magdigital" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "1", "source": "src:t2-magdigital" } ], "value": "magnetic bearing" }, { "key": "compression_n2", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "value": ">108" }, { "key": "cooling", "sources": [ { "page": "10", "source": "src:t2-magdigital" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "value": "200 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t2-magdigital" } ], "value": "none (magnetic bearing, no grease)" }, { "key": "mass", "sources": [ { "page": "10", "source": "src:t2-magdigital" } ], "unitPrinted": "kg", "value": "32" }, { "key": "max_foreline_pressure", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "mbar", "value": "1.7" }, { "key": "mounting_orientation", "sources": [ { "page": "6", "source": "src:t2-magdigital" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-magdigital" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "l/s", "value": "920" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "l/s", "value": "1100" }, { "key": "rotation_speed", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "min-1", "value": "36000" }, { "key": "startup_time", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "min", "value": "< 6" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "11", "source": "src:t2-magdigital" } ], "unitPrinted": "mbar", "value": "< 10-8" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-1600", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG 1600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bearing_type", "sources": [ { "page": "41", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_n2", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "value": "> 10^8" }, { "key": "cooling", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "DN 40 KF" }, { "key": "inlet_flange", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "DN 200 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "4", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "no grease" }, { "key": "mass", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "kg", "value": "70" }, { "key": "max_foreline_pressure", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "mbar", "value": "1.5" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 1250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "l/s", "value": "1250" }, { "key": "rotation_speed", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "service_interval", "sources": [ { "page": "62", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "min", "value": "< 10" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "mbar", "value": "< 10^-8" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-2000", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG 2000", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bearing_type", "sources": [ { "page": "41", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_n2", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "value": "> 10^8" }, { "key": "cooling", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "DN 40 KF" }, { "key": "inlet_flange", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "DN 250 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "4", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "no grease" }, { "key": "mass", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "kg", "value": "68" }, { "key": "max_foreline_pressure", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "mbar", "value": "1.5" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 1550, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "l/s", "value": "1550" }, { "key": "rotation_speed", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "service_interval", "sources": [ { "page": "62", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "text", "value": "maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "min", "value": "< 10" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "9", "source": "src:t2-mag1600-2000" } ], "unitPrinted": "mbar", "value": "< 10^-8" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-400", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG 400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:t2-mag400" } ], "unitPrinted": "°C", "value": "≤ 40" }, { "key": "bearing_type", "sources": [ { "page": "22", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "value": "2.5·10^3" }, { "key": "compression_he", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "value": "6.4·10^4" }, { "key": "compression_n2", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "value": "> 10^9" }, { "key": "cooling", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "DN 25 KF" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "10", "source": "src:t2-mag400" } ], "unitPrinted": "mT", "value": "≤ 5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "kg", "value": "16" }, { "key": "max_foreline_pressure", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "mbar", "value": "0.8" }, { "key": "mounting_orientation", "sources": [ { "page": "5", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "10", "source": "src:t2-mag400" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "DN 10 KF" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "min", "value": "3.5" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "mbar", "value": "< 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "6", "source": "src:t2-mag400" } ], "unitPrinted": "text", "value": "DN 10 KF" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-w-2000", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG W 2000", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "°C", "value": "100" }, { "key": "bearing_type", "sources": [ { "page": "1", "source": "src:t2-mag-w2000" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "value": "9.6 × 10^3" }, { "key": "compression_n2", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "value": "3.8 × 10^8" }, { "key": "cooling", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "text", "value": "DN 40 KF" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "text", "value": "DN 250 CF" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "kg", "value": "72" }, { "key": "max_foreline_pressure", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "mbar", "value": "1" }, { "canonical": { "q": 1650, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "l/s", "value": "1650" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "min", "value": "< 8" }, { "canonical": { "q": 2e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:t2-mag-w2000" } ], "unitPrinted": "mbar", "value": "2 × 10^-10" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-w-2010-c", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG W 2010 C", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bearing_type", "sources": [ { "page": "3", "source": "src:t2-mag-w2010c" } ], "value": "magnetic" }, { "key": "compression_n2", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "value": ">10^8" }, { "key": "cooling", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "value": "DN 250 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "3", "source": "src:t2-mag-w2010c" } ], "value": "none (magnetic bearing, no grease)" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "kg", "value": "approx. 65" }, { "key": "max_foreline_pressure", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "mbar", "value": "3.3" }, { "key": "mounting_orientation", "sources": [ { "page": "3", "source": "src:t2-mag-w2010c" } ], "value": "any" }, { "canonical": { "q": 1650, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "l/s", "value": "1650" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "value": "VCR Nut 1/4\"" }, { "key": "rotation_speed", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "min", "value": "<10" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-mag-w2010c" } ], "unitPrinted": "mbar", "value": "<10^-8" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-w-2010-ct", "lifecycleState": "eol_supported", "name": "TURBOVAC MAG W 2010 CT", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "bearing_type", "sources": [ { "page": "32", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_n2", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "value": "> 10^8" }, { "key": "cooling", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "DN 40 KF" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "DN 250 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "4", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "no grease" }, { "key": "magnetic_field_max", "sources": [ { "page": "14", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "mT", "value": "≤ 5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "kg", "value": "65" }, { "key": "max_foreline_pressure", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "mbar", "value": "3.5" }, { "key": "max_foreline_pressure_ar", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "mbar", "value": "4.3" }, { "key": "max_gas_throughput_ar", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "sccm", "value": "1300" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "14", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 1650, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "l/s", "value": "1650" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "VCR Nut 1/4\"" }, { "key": "rotation_speed", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "min-1", "value": "28800" }, { "key": "service_interval", "sources": [ { "page": "46", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "text", "value": "nearly maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "min", "value": "< 8" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-mag-w2010cht" } ], "unitPrinted": "mbar", "value": "< 10^-8" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "generation": "iP", "id": "pump:leybold-turbovac-mag-w-300", "lifecycleState": "active", "name": "TURBOVAC MAG W 300 iP", "parameters": [], "series": "TURBOVAC MAG", "sources": [ { "page": "23", "source": "src:tf-leybold-mag-w-300-manual" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-maglev", "id": "pump:leybold-turbovac-mag-w-830-c", "lifecycleState": "eol_supported", "name": "MAG W 830 C", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "°C", "value": "5 – 40" }, { "key": "bearing_type", "sources": [ { "page": "10", "source": "src:t2-magdigital05141" } ], "unitPrinted": "text", "value": "5-axes controlled magnetic bearing" }, { "key": "compression_n2", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "ratio", "value": "> 5·10^7" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "type", "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "flange", "value": "DN 160 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "10", "source": "src:t2-magdigital05141" } ], "unitPrinted": "text", "value": "none (grease-free magnetic bearing)" }, { "key": "magnetic_field_max", "sources": [ { "page": "44", "source": "src:t2-magdigital05141" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "kg", "value": "32" }, { "key": "max_foreline_pressure", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "mbar", "value": "2" }, { "key": "mounting_orientation", "sources": [ { "page": "10", "source": "src:t2-magdigital05141" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "44", "source": "src:t2-magdigital05141" } ], "unitPrinted": "dB(A)", "value": "< 70" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 700, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "l/s", "value": "700" }, { "key": "purge_flange", "sources": [ { "page": "22", "source": "src:t2-magdigital05141" } ], "unitPrinted": "flange", "value": "DN 10/16" }, { "key": "rotation_speed", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "min-1", "value": "24000" }, { "key": "startup_time", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "min", "value": "< 4" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "15", "source": "src:t2-magdigital05141" } ], "unitPrinted": "mbar", "value": "< 10^-8" } ], "series": "MAG" }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-220", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 220", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "°C", "value": "+15 - + 40 °c" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:t2-tw220-400" } ], "value": "lifetime lubricated ceramic ball bearings" }, { "key": "magnetic_field_max", "sources": [ { "page": "16", "source": "src:t2-tw220-400" } ], "unitPrinted": "mT", "value": "5 mT (radial) / 15 mT (axial)" }, { "key": "mass", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "kg", "value": "12" }, { "key": "max_foreline_pressure", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "mbar", "value": "8" }, { "canonical": { "q": 320, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "l/s", "value": "320" }, { "key": "rotation_speed", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "rpm", "value": "45000" }, { "key": "service_interval", "sources": [ { "page": "27", "source": "src:t2-tw220-400" } ], "unitPrinted": "h", "value": "80000" }, { "key": "startup_time", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "min", "value": "8" } ], "series": "TURBOVAC" }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-250-s", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 250 S", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "16", "source": "src:t2-tw250s" } ], "unitPrinted": "°C", "value": "≤ 40 °C (104 °F)" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t2-tw250s" } ], "value": "ceramic ball bearings" }, { "key": "compression_ar", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "1.0·10^7" }, { "key": "compression_h2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "5.0·10^2" }, { "key": "compression_he", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "3.2·10^3" }, { "key": "compression_n2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "3.0·10^7" }, { "key": "cooling", "sources": [ { "page": "8", "source": "src:t2-tw250s" } ], "value": "air" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "DN 100 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "16", "source": "src:t2-tw250s" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "kg", "value": "5.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar", "value": "3" }, { "key": "max_gas_throughput_ar", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar l/s", "value": "1.6" }, { "key": "max_gas_throughput_h2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar l/s", "value": "1.1" }, { "key": "max_gas_throughput_he", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar l/s", "value": "2.4" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar l/s", "value": "3.7" }, { "key": "noise_level", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "dB(A)", "value": "< 55" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "l/s", "value": "210" }, { "canonical": { "q": 80, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "l/s", "value": "80" }, { "canonical": { "q": 150, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "l/s", "value": "150" }, { "canonical": { "q": 230, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "l/s", "value": "230" }, { "key": "purge_flange", "sources": [ { "page": "17", "source": "src:t2-tw250s" } ], "value": "M5 (port de purge = port de mise a l'air)" }, { "key": "rotation_speed", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "rpm", "value": "51600" }, { "key": "service_interval", "sources": [ { "page": "38", "source": "src:t2-tw250s" } ], "unitPrinted": "h", "value": "20000" }, { "key": "startup_time", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "min", "value": "approx. 3" }, { "canonical": { "bound": "less_than", "q": 2e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "unitPrinted": "mbar", "value": "< 2·10-8 mbar" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-tw250s" } ], "value": "thread M 5" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-300", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 300", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "°C", "value": "+15 - +30" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "grease" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "kg", "value": "6.0" }, { "key": "max_foreline_pressure", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "mbar", "value": "<1" }, { "key": "noise_level", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "dB(A)", "value": "< 49" }, { "canonical": { "q": 140, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "l/s", "value": "140" }, { "canonical": { "q": 230, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "l/s", "value": "230" }, { "canonical": { "q": 240, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "l/s", "value": "240" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "DN 16 KF" }, { "key": "rotation_speed", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "startup_time", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "min", "value": "ca. 4" }, { "canonical": { "bound": "less_than", "q": 2e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "mbar", "value": "< 2·10-8" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-tw300" } ], "unitPrinted": "text", "value": "DN 16 KF" } ], "series": "TURBOVAC" }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-400", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "°C", "value": "+15 - + 40 °c" }, { "key": "bearing_type", "sources": [ { "page": "8", "source": "src:t2-tw220-400" } ], "value": "lifetime lubricated ceramic ball bearings" }, { "key": "magnetic_field_max", "sources": [ { "page": "16", "source": "src:t2-tw220-400" } ], "unitPrinted": "mT", "value": "5 mT (radial) / 15 mT (axial)" }, { "key": "mass", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "kg", "value": "12" }, { "key": "max_foreline_pressure", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "mbar", "value": "8" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "l/s", "value": "400" }, { "key": "rotation_speed", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "rpm", "value": "48000" }, { "key": "service_interval", "sources": [ { "page": "27", "source": "src:t2-tw220-400" } ], "unitPrinted": "h", "value": "80000" }, { "key": "startup_time", "sources": [ { "page": "10", "source": "src:t2-tw220-400" } ], "unitPrinted": "min", "value": "10" } ], "series": "TURBOVAC" }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-70-h", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 70 H", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "°C", "value": "+ 15 - + 45" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "value": "DN 63 ISO-K / DN 63 CF" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-tw70h" } ], "unitPrinted": "mT", "value": "5 mT radial / 15 mT axial" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "kg", "value": "2.3" }, { "key": "max_foreline_pressure", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "noise_level", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "dB(A)", "value": "< 46" }, { "canonical": { "q": 55, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "l·s-1", "value": "55" }, { "canonical": { "q": 65, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "l·s-1", "value": "65" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "rpm", "value": "72000" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "min", "value": "1.5" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:t2-tw70h" } ], "unitPrinted": "mbar", "value": "< 10-9" } ], "series": "TURBOVAC" }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-700", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 700", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "°C", "value": "10 - 45" }, { "key": "bearing_type", "sources": [ { "page": "2", "source": "src:t2-tw700" } ], "value": "ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tw700" } ], "value": "air" }, { "key": "inlet_flange", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "value": "DN 160 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "2", "source": "src:t2-tw700" } ], "value": "grease" }, { "key": "magnetic_field_max", "sources": [ { "page": "9", "source": "src:t2-tw700" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "kg", "value": "16.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "mounting_orientation", "sources": [ { "page": "11", "source": "src:t2-tw700" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "dB(A)", "value": "< 47" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 530, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "l/s", "value": "530" }, { "canonical": { "q": 680, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "l/s", "value": "680" }, { "key": "purge_flange", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "value": "DN 16 KF" }, { "key": "rotation_speed", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "r.p.m.", "value": "48000" }, { "key": "service_interval", "sources": [ { "page": "31", "source": "src:t2-tw700" } ], "unitPrinted": "h", "value": "15000" }, { "key": "startup_time", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "6", "source": "src:t2-tw700" } ], "unitPrinted": "mbar", "value": "< 10-9" } ], "series": "TURBOVAC", "sources": [ { "page": "1", "source": "src:t2-tw700" } ] }, { "brand": "Leybold", "brandId": "brand:leybold", "family": "fam:tmp-hybrid", "id": "pump:leybold-turbovac-tw-701", "lifecycleState": "eol_supported", "name": "TURBOVAC TW 701", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "11", "source": "src:t2-tw701" } ], "unitPrinted": "°C", "value": "10 - 45" }, { "key": "bake_temp_max", "sources": [ { "page": "42", "source": "src:t2-tw701" } ], "unitPrinted": "°C", "value": "100" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "DN 160 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "grease" }, { "key": "magnetic_field_max", "sources": [ { "page": "14", "source": "src:t2-tw701" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "11", "source": "src:t2-tw701" } ], "unitPrinted": "kg", "value": "16.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "mounting_orientation", "sources": [ { "page": "15", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "11", "source": "src:t2-tw701" } ], "unitPrinted": "dB(A)", "value": "< 47" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 530, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "l/s", "value": "530" }, { "canonical": { "q": 680, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "l/s", "value": "680" }, { "key": "purge_flange", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "text", "value": "DN 16 KF" }, { "key": "rotation_speed", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "rpm", "value": "48000" }, { "key": "service_interval", "sources": [ { "page": "43", "source": "src:t2-tw701" } ], "unitPrinted": "h", "value": "15000" }, { "key": "startup_time", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "min", "value": "approx. 5" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "10", "source": "src:t2-tw701" } ], "unitPrinted": "mbar", "value": "< 10-9" } ], "series": "TURBOVAC" }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-hipace-10", "lifecycleState": "active", "name": "HiPace 10", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "10", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bearing_type", "sources": [ { "page": "10", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "Ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "3 × 10^2" }, { "key": "compression_he", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "3 × 10^3" }, { "key": "compression_n2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "3 × 10^6" }, { "key": "cooling", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "Convection" }, { "key": "inlet_flange", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "DN 25" }, { "key": "magnetic_field_max", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "kg", "value": "1.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "hPa", "value": "25" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "hPa l/s", "value": "0.37" }, { "key": "mounting_orientation", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "dB(A)", "value": "< 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "W", "value": "28.8" }, { "canonical": { "q": 3.7, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "l/s", "value": "3.7" }, { "canonical": { "q": 6, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "l/s", "value": "6" }, { "canonical": { "q": 10, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "l/s", "value": "10" }, { "key": "rotation_speed", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "min-1", "value": "90000" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:ptb-pfeiffer-hipace10" } ], "value": "3 years" }, { "key": "startup_time", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "min", "value": "0.9" }, { "canonical": { "bound": "less_than", "q": 0.00005, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "29", "source": "src:ptb-pfeiffer-hipace10" } ], "unitPrinted": "hPa", "value": "< 5 × 10^-5" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-1200", "lifecycleState": "active", "name": "HiPace 1200", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "Hybrid bearing turbopump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "6 × 10^3" }, { "key": "compression_he", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "2 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "DN 200 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "kg", "value": "27" }, { "key": "max_foreline_pressure", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "hPa", "value": "2" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "hPa l/s", "value": "20" }, { "key": "mounting_orientation", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "Standard (0°-90°)" }, { "key": "noise_level", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "VA", "value": "1350" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "l/s", "value": "1100" }, { "canonical": { "q": 1300, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "l/s", "value": "1300" }, { "canonical": { "q": 1250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "l/s", "value": "1250" }, { "key": "rotation_speed", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "min-1", "value": "37800" }, { "key": "service_interval", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "43", "source": "src:ptb-pfeiffer-hipace1200" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-1500", "lifecycleState": "active", "name": "HiPace 1500", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "Hybrid bearing turbopump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "6 × 10^3" }, { "key": "compression_he", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "2 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "DN 250 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "kg", "value": "29" }, { "key": "max_foreline_pressure", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "hPa", "value": "2" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "hPa l/s", "value": "20" }, { "key": "mounting_orientation", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "Standard (0°-90°)" }, { "key": "noise_level", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "VA", "value": "1350" }, { "canonical": { "q": 1150, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "l/s", "value": "1150" }, { "canonical": { "q": 1350, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "l/s", "value": "1350" }, { "canonical": { "q": 1400, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "l/s", "value": "1400" }, { "key": "rotation_speed", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "min-1", "value": "37800" }, { "key": "service_interval", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "44", "source": "src:ptb-pfeiffer-hipace1500" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-1800", "lifecycleState": "active", "name": "HiPace 1800", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "Hybrid bearing turbopump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "2 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "DN 200 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "38", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "kg", "value": "33" }, { "key": "max_foreline_pressure", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "hPa", "value": "1.8" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "hPa l/s", "value": "20" }, { "key": "mounting_orientation", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "Standard (0°-90°)" }, { "key": "noise_level", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "VA", "value": "1350" }, { "canonical": { "q": 1700, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "l/s", "value": "1700" }, { "canonical": { "q": 1650, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "l/s", "value": "1650" }, { "canonical": { "q": 1450, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "l/s", "value": "1450" }, { "key": "rotation_speed", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "min-1", "value": "31500" }, { "key": "service_interval", "sources": [ { "page": "28", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "min", "value": "4" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "37", "source": "src:ptb-pfeiffer-hipace1800" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-2300", "lifecycleState": "active", "name": "HiPace 2300", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "°C", "value": "5 to 40" }, { "key": "compression_h2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "2 · 10^4" }, { "key": "compression_he", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "3 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "> 1 · 10^8" }, { "key": "cooling", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "DN 250 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "fluide de fonctionnement synthétique (ex. F3)" }, { "key": "magnetic_field_max", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "kg", "value": "34" }, { "key": "max_foreline_pressure", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "hPa", "value": "1.8" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "hPa·l/s", "value": "20" }, { "key": "noise_level", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "dB(A)", "value": "≤ 50" }, { "key": "power_max", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "VA", "value": "1350" }, { "canonical": { "q": 1850, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "l/s", "value": "1850" }, { "canonical": { "q": 2000, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "l/s", "value": "2000" }, { "canonical": { "q": 1900, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "l/s", "value": "1900" }, { "key": "rotation_speed", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "min-1", "value": "31500" }, { "key": "service_interval", "sources": [ { "page": "31", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "years", "value": "4" }, { "key": "startup_time", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "min", "value": "4" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "unitPrinted": "hPa", "value": "< 1 · 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "42", "source": "src:ptb-pfeiffer-hipace2300" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-30", "lifecycleState": "active", "name": "HiPace 30", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "°C", "value": "+5 °C to +30 °C" }, { "key": "bearing_type", "sources": [ { "page": "10", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "Hybrid bearing: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "3 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "Convection" }, { "key": "inlet_flange", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "kg", "value": "2" }, { "key": "max_foreline_pressure", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "hPa", "value": "24" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "hPa l/s", "value": "0.66" }, { "key": "mounting_orientation", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "dB(A)", "value": "≤ 48 dB (A)" }, { "key": "power_max", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "W", "value": "80" }, { "canonical": { "q": 20, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "l/s", "value": "20" }, { "canonical": { "q": 24, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "l/s", "value": "24" }, { "canonical": { "q": 32, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "l/s", "value": "32" }, { "key": "rotation_speed", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "min-1", "value": "90000" }, { "key": "service_interval", "sources": [ { "page": "26", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "min", "value": "1.7" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "34", "source": "src:ptb-pfeiffer-hipace30" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "generation": "TC 400, 24 V DC ou 48 V DC", "id": "pump:pfeiffer-hipace-300", "lifecycleState": "active", "name": "HiPace 300", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "°C", "value": "5 à 35 air, 5 à 40 eau" }, { "key": "compression_h2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603", "viaArtefact": true } ], "unitPrinted": "ratio", "value": "900000" }, { "key": "compression_he", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603", "viaArtefact": true } ], "unitPrinted": "ratio", "value": "> 1e8" }, { "key": "compression_n2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603", "viaArtefact": true } ], "unitPrinted": "ratio", "value": "> 1e11" }, { "key": "gas_mass_max", "sources": [ { "page": "27", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "amu", "value": "80" }, { "key": "inlet_flange", "sources": [ { "page": "10", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "text", "value": "DN 100 ISO-K alu, DN 100 ISO-F alu, DN 100 CF-F inox" }, { "key": "lubricant_ref", "sources": [ { "page": "36", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "value": "PM 143 451 -T (reservoir de fluide, tiges Poroplast incluses)" }, { "key": "mass", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "kg", "value": "6.7" }, { "key": "max_foreline_pressure", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "hPa", "value": "20" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "hPa·l/s", "value": "14" }, { "key": "power_max", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "W", "value": "300" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 255, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "l/s", "value": "255" }, { "canonical": { "q": 260, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "40", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "l/s", "value": "260" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "W", "value": "2.4" }, { "key": "rotation_speed", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "min-1", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "years", "value": "4" }, { "key": "startup_time", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "min", "value": "1.8" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "41", "source": "src:pfeiffer-pt0200-ben-i-1603", "viaArtefact": true } ], "unitPrinted": "hPa", "value": "< 5e-10" }, { "key": "venting_port", "sources": [ { "page": "23", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "value": "G 1/8\"" }, { "key": "venting_rate_max", "sources": [ { "page": "29", "source": "src:pfeiffer-pt0200-ben-i-1603" } ], "unitPrinted": "hPa/s", "value": "15" } ], "series": "HiPace", "sources": [ { "page": "10", "source": "src:pfeiffer-pt0200-ben-i-1603" }, { "page": "1", "source": "src:tf-pfeiffer-hipace-300-manual" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-400", "lifecycleState": "active", "name": "HiPace 400", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "Hybrid bearing TurboDrag pump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "4 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "DN 100 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "kg", "value": "11.6" }, { "key": "max_foreline_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "hPa", "value": "11" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "hPa l/s", "value": "6.5" }, { "key": "mounting_orientation", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "W", "value": "420" }, { "canonical": { "q": 445, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "l/s", "value": "445" }, { "canonical": { "q": 470, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "l/s", "value": "470" }, { "canonical": { "q": 355, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "l/s", "value": "355" }, { "key": "rotation_speed", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "min-1", "value": "49200" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "min", "value": "2" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace400" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-60-p", "lifecycleState": "active", "name": "HiPace 60 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "°C", "value": "+5 °C to +30 °C" }, { "key": "bearing_type", "sources": [ { "page": "10", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "Hybrid bearing: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "2 × 10^2" }, { "key": "compression_he", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "3.5 × 10^2" }, { "key": "compression_n2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "1 × 10^6" }, { "key": "cooling", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "Convection" }, { "key": "inlet_flange", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "kg", "value": "2.2" }, { "key": "max_foreline_pressure", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "hPa", "value": "4" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "hPa l/s", "value": "9.2" }, { "key": "mounting_orientation", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "dB(A)", "value": "≤ 48 dB (A)" }, { "key": "power_max", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "W", "value": "110" }, { "canonical": { "q": 28, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "l/s", "value": "28" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 64, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "32", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "l/s", "value": "64" }, { "key": "rotation_speed", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "min-1", "value": "90000" }, { "key": "service_interval", "sources": [ { "page": "24", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "min", "value": "1.1" }, { "canonical": { "bound": "less_than", "q": 0.000001, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-6" }, { "key": "venting_flange", "sources": [ { "page": "33", "source": "src:ptb-pfeiffer-hipace60p" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-700", "lifecycleState": "active", "name": "HiPace 700", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "Hybrid bearing TurboDrag pump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "4 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "DN 160 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "kg", "value": "11.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "hPa", "value": "11" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "hPa l/s", "value": "6.5" }, { "key": "mounting_orientation", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "W", "value": "400" }, { "canonical": { "q": 555, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "l/s", "value": "555" }, { "canonical": { "q": 655, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "l/s", "value": "655" }, { "canonical": { "q": 685, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "l/s", "value": "685" }, { "key": "rotation_speed", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "min-1", "value": "49200" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "min", "value": "2" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace700" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-80", "lifecycleState": "active", "name": "HiPace 80", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "°C", "value": "+5 °C to +30 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "Hybrid bearing TurboDrag pump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "1.4 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "1.3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "Convection" }, { "key": "inlet_flange", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "mT", "value": "3.3" }, { "key": "mass", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "kg", "value": "2.4" }, { "key": "max_foreline_pressure", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "hPa", "value": "22" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "hPa l/s", "value": "1.3" }, { "key": "mounting_orientation", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "dB(A)", "value": "≤ 48 dB (A)" }, { "key": "power_max", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "W", "value": "110" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 58, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "l/s", "value": "58" }, { "canonical": { "q": 67, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "l/s", "value": "67" }, { "key": "rotation_speed", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "min-1", "value": "90000" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "min", "value": "1.7" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "41", "source": "src:ptb-pfeiffer-hipace80" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-hipace-800", "lifecycleState": "active", "name": "HiPace 800", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bearing_type", "sources": [ { "page": "11", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "Hybrid bearing TurboDrag pump: HV side permanent magnetic bearing, fore-vacuum side ceramic ball bearing" }, { "key": "compression_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "4 × 10^5" }, { "key": "compression_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "3 × 10^7" }, { "key": "compression_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "> 1 × 10^11" }, { "key": "cooling", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "DN 200 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "kg", "value": "12.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "hPa", "value": "11" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "hPa l/s", "value": "6.5" }, { "key": "mounting_orientation", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "in any orientation" }, { "key": "noise_level", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "dB(A)", "value": "≤ 50 dB (A)" }, { "key": "power_max", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "W", "value": "420" }, { "canonical": { "q": 580, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "l/s", "value": "580" }, { "canonical": { "q": 700, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "l/s", "value": "700" }, { "canonical": { "q": 790, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "39", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "l/s", "value": "790" }, { "key": "rotation_speed", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "min-1", "value": "49200" }, { "key": "service_interval", "sources": [ { "page": "30", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "4 years" }, { "key": "startup_time", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "min", "value": "2" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "unitPrinted": "hPa", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "40", "source": "src:ptb-pfeiffer-hipace800" } ], "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-064", "lifecycleState": "eol_supported", "name": "TMH 064", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t3-tmh-u6465" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-u6465" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "4·10^3" }, { "key": "compression_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "7·10^4" }, { "key": "compression_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "> 10^9" }, { "key": "cooling", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "convection" }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "DN 40 ISO-KF" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "kg", "value": "3.6" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar l/s", "value": "1.1" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 20, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "20" }, { "canonical": { "q": 40, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "40" }, { "canonical": { "q": 30, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "30" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "W", "value": "4" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t3-tmh-u6465" } ], "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1·10^-8" }, { "key": "ultimate_pressure_rotary_backing", "sources": [ { "page": "13", "source": "src:t3-tmh-u6465" } ], "unitPrinted": "mbar", "value": "< 2 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-065", "lifecycleState": "eol_supported", "name": "TMH 065", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t3-tmh-u6465" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-u6465" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "1·10^5" }, { "key": "compression_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "1·10^7" }, { "key": "compression_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "> 10^10" }, { "key": "cooling", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "convection" }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "DN 40 ISO-KF" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "kg", "value": "4.7" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar l/s", "value": "0.8" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 34, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "34" }, { "canonical": { "q": 40, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "40" }, { "canonical": { "q": 30, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "30" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "W", "value": "4" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t3-tmh-u6465" } ], "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "min", "value": "3" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1·10^-9" }, { "key": "ultimate_pressure_rotary_backing", "sources": [ { "page": "13", "source": "src:t3-tmh-u6465" } ], "unitPrinted": "mbar", "value": "< 1 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-071", "lifecycleState": "eol_supported", "name": "TMH 071", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "°C", "value": "0 - 40" }, { "key": "compression_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "> 10 5" }, { "key": "compression_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "6 · 10⁶" }, { "key": "compression_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "> 10 11" }, { "key": "inlet_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "DN 63 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "kg", "value": "3.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar l/s", "value": "1.3" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "dB (A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "W", "value": "110" }, { "canonical": { "q": 42, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "42" }, { "canonical": { "q": 50, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "50" }, { "canonical": { "q": 59, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "59" }, { "key": "rotation_speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "Hz", "value": "1500" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "years", "value": "3" }, { "key": "startup_time", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar", "value": "<.1 · 10⁻⁷" }, { "key": "venting_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "G 1/8”" } ], "sources": [ { "page": "1", "source": "src:t2-tmh-tmu-071" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-1001", "lifecycleState": "eol_supported", "name": "TMH 1001 P", "parameters": [ { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-1001" } ], "value": "Wear free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "2·10^6" }, { "key": "compression_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "> 1·10^8" }, { "key": "compression_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-1001" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "DN 200 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "kg", "value": "36" }, { "key": "max_foreline_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar l/s", "value": "20" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 720, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "720" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "920" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "920" }, { "key": "rotation_speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "1/min", "value": "39600" }, { "key": "rotor_temp_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "°C", "value": "120" }, { "key": "service_interval", "sources": [ { "page": "22", "source": "src:t2-tmh-tmu-1001" } ], "value": "once a year" }, { "key": "startup_time", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar", "value": "< 1 · 10-7 mbar" }, { "key": "venting_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-1600", "lifecycleState": "eol_unsupported", "name": "TMH 1600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "High vacuum side: Wear free permanent magnetic bearing. Fore-vacuum side: Oil circulatory lubricated bearings with ceramic balls." }, { "key": "compression_h2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "3 · 10^6" }, { "key": "compression_he", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "> 1 · 10^8" }, { "key": "compression_n2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "heater_power", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "W", "value": "170" }, { "key": "inlet_flange", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "ISO-K" }, { "key": "lubricant", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "TL 011 or F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "mT", "value": "3" }, { "key": "noise_level", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "dB (A)", "value": "< 47" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1050" }, { "canonical": { "q": 1320, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1320" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1100" }, { "key": "rotation_speed", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "1/min", "value": "36000" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "mbar", "value": "< 1 · 10^-8" }, { "key": "venting_flange", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "G 1/8″" } ], "sources": [ { "page": "1", "source": "src:t3-tmh-tmu-1600" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-1601", "lifecycleState": "eol_unsupported", "name": "TMH 1601 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "°C", "value": "0-35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1601" } ], "value": "Wear free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "2 · 10^5" }, { "key": "compression_he", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "2 · 10^7" }, { "key": "compression_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "10^11" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1601" } ], "value": "water cooling (standard)" }, { "key": "inlet_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "DN 200 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "F3" }, { "key": "lubricant_volume", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "cm3", "value": "65" }, { "key": "magnetic_field_max", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "kg", "value": "49/51" }, { "key": "max_foreline_pressure", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar·l/s", "value": "22" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "dB(A)", "value": "47" }, { "key": "outlet_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "DN 40 ISO-KF" }, { "canonical": { "q": 750, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "750" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "1100" }, { "canonical": { "q": 1000, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "1000" }, { "key": "purge_flange", "sources": [ { "page": "27", "source": "src:t3-tmh1601tmu" } ], "unitPrinted": "text", "value": "DN 10 ISO-KF" }, { "key": "rotation_speed", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "1/min", "value": "36000" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tmh1601tmu" } ], "unitPrinted": "text", "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "min", "value": "6" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar", "value": "< 1 · 10-8" }, { "key": "venting_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "G 1/8″" } ], "series": "TMH/TMU 1601" }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-260", "lifecycleState": "eol_supported", "name": "TMH 260", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "1.3 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "> 1 × 10^9" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "Water cooling (standard)" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mT", "value": "5.5" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "kg", "value": "7.5" }, { "key": "max_foreline_pressure", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar l/s", "value": "3.5" }, { "key": "noise_level", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "outlet_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "DN 25 ISO-KF / G 1/4\"" }, { "canonical": { "q": 180, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "180" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "radiated_heat_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "W", "value": "8" }, { "key": "rotation_speed", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "1/min", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "min", "value": "1:45" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar", "value": "< 1 × 10^-8 mbar" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-261", "lifecycleState": "eol_supported", "name": "TMH 261", "parameters": [], "series": "TMH", "sources": [ { "page": "34", "source": "src:tf-pfeiffer-tmu-261-manual" }, { "page": "7", "source": "src:tf-pfeiffer-tmu-261-manual" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-262", "lifecycleState": "eol_supported", "name": "TMH 262", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "1.3 · 10^4" }, { "key": "compression_he", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "3 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "> 1 · 10^9" }, { "key": "inlet_flange", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mT", "value": "5.5" }, { "key": "mass", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "kg", "value": "4.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar l/s", "value": "4.7" }, { "key": "noise_level", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "power_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "W", "value": "150" }, { "canonical": { "q": 190, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "190" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "radiated_heat_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "W", "value": "8" }, { "key": "rotation_speed", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "1/min", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "°C", "value": "90" }, { "key": "startup_time", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "min", "value": "3.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar", "value": "< 1 · 10^-8" }, { "key": "venting_flange", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmh-521", "lifecycleState": "eol_supported", "name": "TMH 521 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-521" } ], "value": "oil circulatory lubricated ball bearing with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "5·10^6" }, { "key": "compression_he", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "5·10^7" }, { "key": "compression_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-521" } ], "value": "Water cooling or air cooling required" }, { "key": "inlet_flange", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "kg", "value": "13" }, { "key": "max_foreline_pressure", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar", "value": "16" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar l/s", "value": "3" }, { "key": "mounting_orientation", "sources": [ { "page": "6", "source": "src:t2-tmh-tmu-521" } ], "value": "vertically (0°) up to an angle of 90° maximum" }, { "key": "noise_level", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "power_max", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "W", "value": "300" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "purge_flange", "sources": [ { "page": "22", "source": "src:t2-tmh-tmu-521" } ], "value": "DN 16 ISO-KF-10" }, { "key": "rotation_speed", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "rpm", "value": "50000" }, { "key": "service_interval", "sources": [ { "page": "17", "source": "src:t2-tmh-tmu-521" } ], "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "min", "value": "5.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar", "value": "< 1·10^-8 mbar" }, { "key": "venting_flange", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-064", "lifecycleState": "eol_supported", "name": "TMU 064", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t3-tmh-u6465" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-u6465" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "4·10^3" }, { "key": "compression_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "7·10^4" }, { "key": "compression_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "> 10^9" }, { "key": "cooling", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "convection" }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "DN 63 CF-F" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "kg", "value": "3.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar l/s", "value": "1.1" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 31, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "31" }, { "canonical": { "q": 42, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "42" }, { "canonical": { "q": 53, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "53" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "W", "value": "4" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t3-tmh-u6465" } ], "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 1e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1·10^-8" }, { "key": "ultimate_pressure_rotary_backing", "sources": [ { "page": "13", "source": "src:t3-tmh-u6465" } ], "unitPrinted": "mbar", "value": "< 2 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-065", "lifecycleState": "eol_supported", "name": "TMU 065", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t3-tmh-u6465" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-u6465" } ], "value": "oil circulatory lubricated bearings with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "1·10^5" }, { "key": "compression_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "1·10^7" }, { "key": "compression_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "> 10^10" }, { "key": "cooling", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "convection" }, { "key": "inlet_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "DN 63 CF-F" }, { "key": "lubricant", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mT", "value": "4" }, { "key": "mass", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "kg", "value": "5.1" }, { "key": "max_foreline_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar l/s", "value": "0.8" }, { "key": "noise_level", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 36, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "36" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 56, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "l/s", "value": "56" }, { "key": "radiated_heat_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "W", "value": "4" }, { "key": "rotation_speed", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "1/min", "value": "90000" }, { "key": "rotor_temp_max", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t3-tmh-u6465" } ], "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "min", "value": "3" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "unitPrinted": "mbar", "value": "< 1·10^-9" }, { "key": "ultimate_pressure_rotary_backing", "sources": [ { "page": "13", "source": "src:t3-tmh-u6465" } ], "unitPrinted": "mbar", "value": "< 1 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "13", "source": "src:t2-tmh-tmu-064-065" } ], "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-071", "lifecycleState": "eol_supported", "name": "TMU 071", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "°C", "value": "0 - 40" }, { "key": "compression_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "> 10 5" }, { "key": "compression_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "6 · 10⁶" }, { "key": "compression_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "> 10 11" }, { "key": "inlet_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "DN 63 CF-F" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "kg", "value": "3.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar l/s", "value": "1.3" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "dB (A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "W", "value": "110" }, { "canonical": { "q": 42, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "42" }, { "canonical": { "q": 50, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "50" }, { "canonical": { "q": 59, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "l/s", "value": "59" }, { "key": "rotation_speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "Hz", "value": "1500" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "years", "value": "3" }, { "key": "startup_time", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "min", "value": "2.5" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "unitPrinted": "mbar", "value": "< 5 · 10⁻¹⁰" }, { "key": "venting_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-071" } ], "value": "G 1/8”" } ], "sources": [ { "page": "1", "source": "src:t2-tmh-tmu-071" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-1001", "lifecycleState": "eol_supported", "name": "TMU 1001 P", "parameters": [ { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-1001" } ], "value": "Wear free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "2·10^6" }, { "key": "compression_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "> 1·10^8" }, { "key": "compression_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-1001" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "DN 200 CF-F" }, { "key": "lubricant", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "kg", "value": "38" }, { "key": "max_foreline_pressure", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar", "value": "18" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar l/s", "value": "20" }, { "key": "noise_level", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "canonical": { "q": 720, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "720" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "920" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "l/s", "value": "920" }, { "key": "rotation_speed", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "1/min", "value": "39600" }, { "key": "rotor_temp_max", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "°C", "value": "120" }, { "key": "service_interval", "sources": [ { "page": "22", "source": "src:t2-tmh-tmu-1001" } ], "value": "once a year" }, { "key": "startup_time", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t2-tmh-tmu-1001" } ], "unitPrinted": "mbar", "value": "< 1 · 10-10 mbar" }, { "key": "venting_flange", "sources": [ { "page": "24", "source": "src:t2-tmh-tmu-1001" } ], "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-1600", "lifecycleState": "eol_unsupported", "name": "TMU 1600", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "High vacuum side: Wear free permanent magnetic bearing. Fore-vacuum side: Oil circulatory lubricated bearings with ceramic balls." }, { "key": "compression_h2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "3 · 10^6" }, { "key": "compression_he", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "> 1 · 10^8" }, { "key": "compression_n2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "ratio", "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "heater_power", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "W", "value": "170" }, { "key": "inlet_flange", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "CF-F" }, { "key": "lubricant", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "TL 011 or F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "mT", "value": "3" }, { "key": "noise_level", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "dB (A)", "value": "< 47" }, { "canonical": { "q": 1150, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1150" }, { "canonical": { "q": 1450, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1450" }, { "canonical": { "q": 1500, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "l/s", "value": "1500" }, { "key": "rotation_speed", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "1/min", "value": "36000" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "mbar", "value": "< 1 · 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "14", "source": "src:t3-tmh-tmu-1600" } ], "unitPrinted": "text", "value": "G 1/8″" } ], "sources": [ { "page": "1", "source": "src:t3-tmh-tmu-1600" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-1601", "lifecycleState": "eol_unsupported", "name": "TMU 1601 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "°C", "value": "0-35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1601" } ], "value": "Wear free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "2 · 10^5" }, { "key": "compression_he", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "2 · 10^7" }, { "key": "compression_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "ratio", "value": "10^11" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tmh-tmu-1601" } ], "value": "water cooling (standard)" }, { "key": "inlet_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "DN 200 CF-F" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "F3" }, { "key": "lubricant_volume", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "cm3", "value": "65" }, { "key": "magnetic_field_max", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mT", "value": "3" }, { "key": "mass", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "kg", "value": "49/51" }, { "key": "max_foreline_pressure", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar", "value": "14" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar·l/s", "value": "22" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "dB(A)", "value": "47" }, { "key": "outlet_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "DN 40 ISO-KF" }, { "canonical": { "q": 750, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "750" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "1100" }, { "canonical": { "q": 1000, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "l/s", "value": "1000" }, { "key": "purge_flange", "sources": [ { "page": "27", "source": "src:t3-tmh1601tmu" } ], "unitPrinted": "text", "value": "DN 10 ISO-KF" }, { "key": "rotation_speed", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "1/min", "value": "36000" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tmh1601tmu" } ], "unitPrinted": "text", "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "min", "value": "6" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t3-tmh-tmu-1601" } ], "unitPrinted": "mbar", "value": "< 1 · 10-10" }, { "key": "venting_flange", "sources": [ { "page": "23", "source": "src:t3-tmh-tmu-1601" } ], "value": "G 1/8″" } ], "series": "TMH/TMU 1601" }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-260", "lifecycleState": "eol_supported", "name": "TMU 260", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "1.3 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "> 1 × 10^9" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "Water cooling (standard)" }, { "key": "inlet_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mT", "value": "5.5" }, { "key": "mass", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "kg", "value": "8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar", "value": "10" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar l/s", "value": "3.5" }, { "key": "noise_level", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "outlet_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "DN 25 ISO-KF / G 1/4\"" }, { "canonical": { "q": 180, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "180" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "radiated_heat_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "W", "value": "8" }, { "key": "rotation_speed", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "1/min", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "°C", "value": "90" }, { "key": "service_interval", "sources": [ { "page": "11", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "once every year" }, { "key": "startup_time", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "min", "value": "1:45" }, { "canonical": { "bound": "less_than", "q": 4.9999999999999995e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "mbar", "value": "< 5 × 10^-11 mbar" }, { "key": "venting_flange", "sources": [ { "page": "12", "source": "src:t2-tmh-tmu-260" } ], "unitPrinted": "text", "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-261", "lifecycleState": "eol_supported", "name": "TMU 261", "parameters": [], "series": "TMU", "sources": [ { "page": "1", "source": "src:tf-pfeiffer-tmu-261-manual" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-262", "lifecycleState": "eol_supported", "name": "TMU 262", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "compression_h2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "1.3 · 10^4" }, { "key": "compression_he", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "3 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "ratio", "value": "> 1 · 10^9" }, { "key": "inlet_flange", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mT", "value": "5.5" }, { "key": "mass", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "kg", "value": "6.8" }, { "key": "max_foreline_pressure", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar", "value": "8.5" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar l/s", "value": "3.2" }, { "key": "noise_level", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "power_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "W", "value": "150" }, { "canonical": { "q": 190, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "190" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "radiated_heat_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "W", "value": "8" }, { "key": "rotation_speed", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "1/min", "value": "60000" }, { "key": "rotor_temp_max", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "°C", "value": "90" }, { "key": "startup_time", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "min", "value": "3.5" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "mbar", "value": "< 5 · 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "18", "source": "src:t2-tmh-tmu-262" } ], "unitPrinted": "text", "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tmu-521", "lifecycleState": "eol_supported", "name": "TMU 521 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "°C", "value": "0 - 35" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-521" } ], "value": "oil circulatory lubricated ball bearing with ceramic balls (fore-vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "5·10^6" }, { "key": "compression_he", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "5·10^7" }, { "key": "compression_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "> 10^12" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t2-tmh-tmu-521" } ], "value": "Water cooling or air cooling required" }, { "key": "inlet_flange", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "DN 100 CF-F" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mT", "value": "5" }, { "key": "mass", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "kg", "value": "13" }, { "key": "max_foreline_pressure", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar", "value": "16" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar l/s", "value": "3" }, { "key": "mounting_orientation", "sources": [ { "page": "6", "source": "src:t2-tmh-tmu-521" } ], "value": "vertically (0°) up to an angle of 90° maximum" }, { "key": "noise_level", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "dB (A)", "value": "< 50" }, { "key": "power_max", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "W", "value": "300" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "400" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "l/s", "value": "300" }, { "key": "purge_flange", "sources": [ { "page": "22", "source": "src:t2-tmh-tmu-521" } ], "value": "DN 16 ISO-KF-10" }, { "key": "rotation_speed", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "rpm", "value": "50000" }, { "key": "service_interval", "sources": [ { "page": "17", "source": "src:t2-tmh-tmu-521" } ], "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "min", "value": "5.5" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "5", "source": "src:t2-tmh-tmu-521" } ], "unitPrinted": "mbar", "value": "< 5·10^-10 mbar" }, { "key": "venting_flange", "sources": [ { "page": "19", "source": "src:t2-tmh-tmu-521" } ], "value": "G 1/8”" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-110", "lifecycleState": "eol_unsupported", "name": "TPH 110", "parameters": [ { "key": "bake_temp_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "°C", "value": "160" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "ball bearing (high-precision), wick-lubricated" }, { "key": "compression_h2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "ratio", "value": "500" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "water-cooled (standard); air-cooled variant available" }, { "key": "inlet_flange", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "oil, wick-fed (impregnated wicks)" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "kg", "value": "6" }, { "key": "mounting_orientation", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "horizontal to vertical" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "170" }, { "canonical": { "q": 120, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "120" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "170" }, { "key": "rotation_speed", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "1/min", "value": "43000" }, { "key": "service_interval", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "h", "value": "approx. 5000" }, { "key": "startup_time", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "min", "value": "1" }, { "canonical": { "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "mbar", "value": "10^-11" }, { "key": "venting_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "DN 10 KF" } ], "series": "PFEIFFER TURBO", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-110" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-1201", "lifecycleState": "eol_unsupported", "name": "TPH 1201 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°C", "value": "+5°C to +40°C" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "Wear-free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": "6 · 10^3" }, { "key": "compression_he", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": "2 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": ">1 · 10^8" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "DN 200 ISO-K / DN 200 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "kg", "value": "32 (ISO-K) / 33 (ISO-F)" }, { "key": "max_foreline_pressure", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar", "value": "2" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar l/s", "value": "20" }, { "key": "mounting_orientation", "sources": [ { "page": "9", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°", "value": "0° to 90°" }, { "key": "noise_level", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "dB (A)", "value": "57" }, { "canonical": { "q": 1100, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1100" }, { "canonical": { "q": 1300, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1300" }, { "canonical": { "q": 1250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1250" }, { "key": "radiated_heat_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "W", "value": "75" }, { "key": "rotation_speed", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "Hz", "value": "630" }, { "key": "rotor_temp_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°C", "value": "120" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "four years (minimum)" }, { "key": "startup_time", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar", "value": "< 1 · 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-170", "lifecycleState": "eol_unsupported", "name": "TPH 170", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "°C", "value": "0 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "32", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "ball bearing" }, { "key": "compression_he", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "ratio", "value": "20000" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "water-cooled" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "kg", "value": "7" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "vertical to horizontal" }, { "key": "outlet_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "DN 25 KF" }, { "canonical": { "q": 130, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "l/s", "value": "130" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "l/s", "value": "170" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "1/min", "value": "43000" }, { "key": "service_interval", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "h", "value": "5000" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "min", "value": "1" }, { "canonical": { "q": 5e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "mbar", "value": "5e-8" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-170" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tph-2301", "lifecycleState": "eol_unsupported", "name": "TPH 2301 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "°C", "value": "120" }, { "key": "compression_h2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "2 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "DN 250 ISO-K" }, { "key": "lubricant", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "kg", "value": "41" }, { "key": "max_foreline_pressure", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar", "value": "1.8" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar l/s", "value": "34" }, { "key": "mounting_orientation", "sources": [ { "page": "9", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "Fore-vacuum flange must always point downwards (vertical mounting only)" }, { "key": "noise_level", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "dB (A)", "value": "50" }, { "canonical": { "q": 1850, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1850" }, { "canonical": { "q": 2050, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "2050" }, { "canonical": { "q": 1900, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1900" }, { "key": "rotation_speed", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "Hz (1/min)", "value": "525 (31 500)" }, { "key": "service_interval", "sources": [ { "page": "24", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "min", "value": "8" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar", "value": "< 1 × 10^-7" }, { "key": "venting_flange", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-330", "lifecycleState": "eol_unsupported", "name": "TPH 330", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "°C", "value": "≤35" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "water" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "any" }, { "key": "startup_time", "sources": [ { "page": "18", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "min", "value": "3" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-330-510" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tph-510", "lifecycleState": "eol_unsupported", "name": "TPH 510", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "°C", "value": "≤35" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "water" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "any" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-330-510" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-110", "lifecycleState": "eol_unsupported", "name": "TPU 110", "parameters": [ { "key": "bake_temp_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "°C", "value": "160" }, { "key": "bearing_type", "sources": [ { "page": "6", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "ball bearing (high-precision), wick-lubricated" }, { "key": "compression_h2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "ratio", "value": "500" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "water-cooled (standard); air-cooled variant available" }, { "key": "inlet_flange", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "DN 100 CF" }, { "key": "lubricant", "sources": [ { "page": "6", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "oil, wick-fed (impregnated wicks)" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "kg", "value": "8" }, { "key": "mounting_orientation", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "horizontal to vertical" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "170" }, { "canonical": { "q": 120, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "120" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "l/s", "value": "170" }, { "key": "rotation_speed", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "1/min", "value": "43000" }, { "key": "service_interval", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "h", "value": "approx. 5000" }, { "key": "startup_time", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "min", "value": "1" }, { "canonical": { "q": 1e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "mbar", "value": "10^-11" }, { "key": "venting_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-110" } ], "unitPrinted": "text", "value": "DN 10 KF" } ], "series": "PFEIFFER TURBO", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-110" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-1201", "lifecycleState": "eol_unsupported", "name": "TPU 1201 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°C", "value": "+5°C to +40°C" }, { "key": "bearing_type", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "Wear-free permanent magnetic bearing (high vacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": "6 · 10^3" }, { "key": "compression_he", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": "2 · 10^5" }, { "key": "compression_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "ratio", "value": ">1 · 10^8" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "DN 200 CF-F" }, { "key": "lubricant", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mT", "value": "6" }, { "key": "mass", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "kg", "value": "43" }, { "key": "max_foreline_pressure", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar", "value": "2" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar l/s", "value": "18" }, { "key": "mounting_orientation", "sources": [ { "page": "9", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°", "value": "0° to 90°" }, { "key": "noise_level", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "dB (A)", "value": "57" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1050" }, { "canonical": { "q": 1230, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1230" }, { "canonical": { "q": 1170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "l/s", "value": "1170" }, { "key": "radiated_heat_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "W", "value": "75" }, { "key": "rotation_speed", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "Hz", "value": "630" }, { "key": "rotor_temp_max", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "°C", "value": "120" }, { "key": "service_interval", "sources": [ { "page": "25", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "four years (minimum)" }, { "key": "startup_time", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "min", "value": "5" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "mbar", "value": "< 5 · 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "27", "source": "src:t3-tph-tpu-1201" } ], "unitPrinted": "text", "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-170", "lifecycleState": "eol_unsupported", "name": "TPU 170", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "°C", "value": "0 to 35" }, { "key": "bake_temp_max", "sources": [ { "page": "17", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "32", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "ball bearing" }, { "key": "compression_he", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "ratio", "value": "20000" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "water-cooled" }, { "key": "heater_power", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "W", "value": "60" }, { "key": "inlet_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "DN 100 CF" }, { "key": "lubricant", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "magnetic_field_max", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "kg", "value": "9" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "vertical to horizontal" }, { "key": "outlet_flange", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "text", "value": "DN 25 KF" }, { "canonical": { "q": 130, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "l/s", "value": "130" }, { "canonical": { "q": 170, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "l/s", "value": "170" }, { "key": "rotation_speed", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "1/min", "value": "43000" }, { "key": "service_interval", "sources": [ { "page": "19", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "h", "value": "5000" }, { "key": "startup_time", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "min", "value": "1" }, { "canonical": { "q": 5e-8, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "7", "source": "src:t3-tph-tpu-170" } ], "unitPrinted": "mbar", "value": "5e-8" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-170" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tpu-2301", "lifecycleState": "eol_unsupported", "name": "TPU 2301 P", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "°C", "value": "+5 °C to +40 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "3", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "°C", "value": "120" }, { "key": "compression_h2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "2 × 10^4" }, { "key": "compression_he", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "3 × 10^5" }, { "key": "compression_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "value": "> 1 × 10^8" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "DN 250 ISO-F" }, { "key": "lubricant", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "F3" }, { "key": "magnetic_field_max", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mT", "value": "7" }, { "key": "mass", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "kg", "value": "42" }, { "key": "max_foreline_pressure", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar", "value": "1.6" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar l/s", "value": "30" }, { "key": "mounting_orientation", "sources": [ { "page": "9", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "Fore-vacuum flange must always point downwards (vertical mounting only)" }, { "key": "noise_level", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "dB (A)", "value": "50" }, { "canonical": { "q": 1770, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1770" }, { "canonical": { "q": 1880, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1880" }, { "canonical": { "q": 1800, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "l/s", "value": "1800" }, { "key": "rotation_speed", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "Hz (1/min)", "value": "525 (31 500)" }, { "key": "service_interval", "sources": [ { "page": "24", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "at least once a year" }, { "key": "startup_time", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "min", "value": "8" }, { "canonical": { "bound": "less_than", "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "mbar", "value": "< 5 × 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "26", "source": "src:t3-tph-tpu-2301" } ], "unitPrinted": "text", "value": "G 1/8\"" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-330", "lifecycleState": "eol_unsupported", "name": "TPU 330", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "°C", "value": "≤35" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "water" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "any" }, { "key": "startup_time", "sources": [ { "page": "18", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "min", "value": "3" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-330-510" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-classic", "id": "pump:pfeiffer-tpu-510", "lifecycleState": "eol_unsupported", "name": "TPU 510", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "14", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "°C", "value": "≤35" }, { "key": "cooling", "sources": [ { "page": "5", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "water" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "TL 011" }, { "key": "mounting_orientation", "sources": [ { "page": "4", "source": "src:t3-tph-tpu-330-510" } ], "unitPrinted": "text", "value": "any" } ], "sources": [ { "page": "1", "source": "src:t3-tph-tpu-330-510" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsh-064", "lifecycleState": "eol_unsupported", "name": "TSH 064 D", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "air" }, { "key": "electrical_connection_load", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kW", "value": "0.3" }, { "key": "inlet_flange", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mT", "value": "≤ 7.0" }, { "key": "mass", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kg", "value": "25" }, { "key": "mounting_orientation", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "horizontal" }, { "canonical": { "q": 31, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "31" }, { "canonical": { "q": 42, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "10", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "42" }, { "canonical": { "q": 53, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "53" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mbar", "value": "< 1 · 10-9" } ], "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsh-065", "lifecycleState": "eol_unsupported", "name": "TSH 065 D", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "air" }, { "key": "electrical_connection_load", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kW", "value": "0.3" }, { "key": "inlet_flange", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mT", "value": "≤ 7.0" }, { "key": "mass", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kg", "value": "26" }, { "key": "mounting_orientation", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "horizontal" }, { "canonical": { "q": 36, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "36" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "10", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 56, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "56" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mbar", "value": "< 1 · 10-9" } ], "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsh-071", "lifecycleState": "eol_unsupported", "name": "TSH 071", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "text", "value": "air" }, { "key": "inlet_flange", "sources": [ { "page": "14", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "text", "value": "DN 63 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "5", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "mT", "value": "≤ 4" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "14", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "l/s", "value": "60" }, { "key": "service_interval", "sources": [ { "page": "12", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "text", "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "14", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "mbar", "value": "< 1 · 10-7" } ], "sources": [ { "page": "1", "source": "src:t3-tsh-tsu-071-261" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsh-261", "lifecycleState": "eol_unsupported", "name": "TSH 261", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "text", "value": "air" }, { "key": "inlet_flange", "sources": [ { "page": "14", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "text", "value": "DN 100 ISO-K" }, { "key": "magnetic_field_max", "sources": [ { "page": "5", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "mT", "value": "≤ 5.5" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "14", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "l/s", "value": "210" }, { "key": "service_interval", "sources": [ { "page": "12", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "text", "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-7, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "14", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "mbar", "value": "< 1 · 10-7" } ], "sources": [ { "page": "1", "source": "src:t3-tsh-tsu-071-261" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsu-064", "lifecycleState": "eol_unsupported", "name": "TSU 064 D", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "air" }, { "key": "electrical_connection_load", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kW", "value": "0.3" }, { "key": "inlet_flange", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "DN 63 CF-F" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mT", "value": "≤ 7.0" }, { "key": "mass", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kg", "value": "25.2" }, { "key": "mounting_orientation", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "horizontal" }, { "canonical": { "q": 31, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "31" }, { "canonical": { "q": 42, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "10", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "42" }, { "canonical": { "q": 53, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "53" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mbar", "value": "< 1 · 10-9" } ], "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsu-065", "lifecycleState": "eol_unsupported", "name": "TSU 065 D", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "15", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "air" }, { "key": "electrical_connection_load", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kW", "value": "0.35" }, { "key": "inlet_flange", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "DN 63 CF-F" }, { "key": "magnetic_field_max", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mT", "value": "≤ 7.0" }, { "key": "mass", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "kg", "value": "26.4" }, { "key": "mounting_orientation", "sources": [ { "page": "17", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "horizontal" }, { "canonical": { "q": 36, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "36" }, { "canonical": { "q": 48, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "10", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "48" }, { "canonical": { "q": 56, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "l/s", "value": "56" }, { "key": "service_interval", "sources": [ { "page": "20", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "text", "value": "at least once a year" }, { "canonical": { "bound": "less_than", "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ], "unitPrinted": "mbar", "value": "< 1 · 10-9" } ], "sources": [ { "page": "22", "source": "src:t3-tsh-tsu-064-065" } ] }, { "brand": "Pfeiffer Vacuum", "brandId": "brand:pfeiffer", "family": "fam:tmp-hybrid", "id": "pump:pfeiffer-tsu-071", "lifecycleState": "eol_unsupported", "name": "TSU 071", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "4", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "°C", "value": "≤ 35" }, { "key": "cooling", "sources": [ { "page": "4", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "text", "value": "air" }, { "key": "inlet_flange", "sources": [ { "page": "14", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "text", "value": "DN 63 CF-F" }, { "key": "magnetic_field_max", "sources": [ { "page": "5", "source": "src:t3-tsh-tsu-071-261" } ], "unitPrinted": "mT", "value": "≤ 4" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": 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"litre", "value": "0.7" } ] }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-1003", "lifecycleState": "eol_supported", "name": "STP-1003", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "22", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "10^5" }, { "key": "compression_n2", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "10^8" }, { "key": "cooling", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "Natural air cooling (Water cooling, Air cooling: At baking and gas pumping)" }, { "key": "inlet_flange", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "ICF253/VG200/ISO200" }, { "key": "lubricant", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "28", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "15 mT (150 G) axial, 3 mT (30 G) radial" }, { "key": "mass", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "kg", "value": "31" }, { "key": "max_foreline_pressure", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "13 (0.1)" }, { "key": "mounting_orientation", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "<50" }, { "canonical": { "q": 800, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "l/s", "value": "800" }, { "canonical": { "q": 1000, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "l/s", "value": "1000" }, { "key": "rotation_speed", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "rpm", "value": "35000" }, { "key": "startup_time", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "min", "value": "6" }, { "canonical": { "q": 1e-10, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "10^-8 Pa (10^-10 Torr)" } ] }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-603", "lifecycleState": "eol_supported", "name": "STP-603", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "22", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "10^5" }, { "key": "compression_n2", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "10^8" }, { "key": "cooling", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "Natural air cooling (Water cooling, Air cooling: At baking and gas pumping)" }, { "key": "inlet_flange", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "ICF203/VG150/ISO160" }, { "key": "lubricant", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "28", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "15 mT (150 G) axial, 3 mT (30 G) radial" }, { "key": "mass", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "kg", "value": "31" }, { "key": "max_foreline_pressure", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "13 (0.1)" }, { "key": "mounting_orientation", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "<50" }, { "canonical": { "q": 550, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "l/s", "value": "550" }, { "canonical": { "q": 650, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "l/s", "value": "650" }, { "key": "rotation_speed", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "rpm", "value": "35000" }, { "key": "startup_time", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "min", "value": "6" }, { "canonical": { "q": 1e-10, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "107", "source": "src:t2-stp-603-1003" } ], "unitPrinted": "text", "value": "10^-8 Pa (10^-10 Torr)" } ] }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-a2203", "lifecycleState": "eol_supported", "name": "STP-A2203", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "21", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "magnetic bearings with solid-lubricated touch-down (backup) bearings" }, { "key": "compression_h2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "ratio", "value": "2.5×10^4" }, { "key": "compression_n2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "ratio", "value": ">10^8" }, { "key": "cooling", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "VG250/ISO250F/ICF305" }, { "key": "lubricant", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "magnetic_field_max", "sources": [ { "page": "27", "source": "src:t2-stp-a2203" } ], "unitPrinted": "mT", "value": "15" }, { "key": "mass", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "kg", "value": "61" }, { "key": "max_foreline_pressure", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "Pa (Torr)", "value": "400 (3)" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "Pa・m3/s (SCCM)", "value": "2.5 (1500)" }, { "key": "mounting_orientation", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 1700, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "L/s", "value": "1700" }, { "canonical": { "q": 2200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "L/s", "value": "2200" }, { "key": "purge_flange", "sources": [ { "page": "24", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "KF10" }, { "key": "rotation_speed", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "rpm", "value": "27,000" }, { "key": "service_interval", "sources": [ { "page": "102", "source": "src:t2-stp-a2203" } ], "unitPrinted": "text", "value": "three to six months" }, { "key": "startup_time", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "min", "value": "7" }, { "key": "ultimate_pressure", "sources": [ { "page": "107", "source": "src:t2-stp-a2203" } ], "unitPrinted": "Pa (Torr)", "value": "10-６(10-８) order (after baking)" } ] }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-a2503", "lifecycleState": "eol_supported", "name": "STP-A2503", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "9", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "6×10^3" }, { "key": "compression_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": ">10^8" }, { "key": "cooling", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "VG250/ISO250F/ICF305" }, { "key": "lubricant", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "kg", "value": "72" }, { "key": "max_foreline_pressure", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "333 (2.5)" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "3.0 (1800)" }, { "key": "mounting_orientation", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "<50" }, { "canonical": { "q": 1600, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "l/s", "value": "1600" }, { "canonical": { "q": 2500, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "l/s", "value": "2500" }, { "key": "purge_flange", "sources": [ { "page": "13", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "KF10" }, { "key": "rotation_speed", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "startup_time", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "min", "value": "9" }, { "canonical": { "q": 1e-8, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "10^-6 Pa (10^-8 Torr)" } ] }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-a3003", "lifecycleState": "eol_supported", "name": "STP-A3003", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "°C", "value": "<120" }, { "key": "bearing_type", "sources": [ { "page": "9", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "magnetic" }, { "key": "compression_h2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "6×10^3" }, { "key": "compression_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": ">10^8" }, { "key": "cooling", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "VG300/VG350/ISO320F" }, { "key": "lubricant", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "kg", "value": "72" }, { "key": "max_foreline_pressure", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "333 (2.5)" }, { "key": "max_gas_throughput_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "3.0 (1800)" }, { "key": "mounting_orientation", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "<50" }, { "canonical": { "q": 1800, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "l/s", "value": "1800" }, { "canonical": { "q": 3000, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "l/s", "value": "3000" }, { "key": "purge_flange", "sources": [ { "page": "13", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "KF10" }, { "key": "rotation_speed", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "startup_time", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "min", "value": "9" }, { "canonical": { "q": 1e-8, "restatedInSource": { "count": 1, "spread": 1.333 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "8", "source": "src:t2-stp-a2503-a3003" } ], "unitPrinted": "text", "value": "10^-6 Pa (10^-8 Torr)" } ] }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-h1303", "lifecycleState": "legacy_in_service", "name": "STP-H1303", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "°C", "value": "120" }, { "key": "compression_h2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "104" }, { "key": "compression_n2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": ">108" }, { "key": "cooling", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "VG200/ISO200" }, { "key": "lubricant", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "kg", "value": "39" }, { "key": "max_foreline_pressure", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "Pa", "value": "270" }, { "key": "mounting_orientation", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 1000, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "L/s", "value": "1000" }, { "canonical": { "q": 1300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "L/s", "value": "1300" }, { "key": "rotation_speed", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "rpm", "value": "32500" }, { "key": "startup_time", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "min", "value": "7" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "Pa", "value": "10-7" } ] }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-h803", "lifecycleState": "legacy_in_service", "name": "STP-H803", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "°C", "value": "120" }, { "key": "compression_h2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "104" }, { "key": "compression_n2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": ">108" }, { "key": "cooling", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "VG150/ISO160" }, { "key": "lubricant", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "kg", "value": "39" }, { "key": "max_foreline_pressure", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "Pa", "value": "270" }, { "key": "mounting_orientation", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "dB", "value": "<50" }, { "canonical": { "q": 600, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "L/s", "value": "600" }, { "canonical": { "q": 800, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "L/s", "value": "800" }, { "key": "rotation_speed", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "rpm", "value": "32500" }, { "key": "startup_time", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "min", "value": "7" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "106", "source": "src:ptb-seiko-seiki-stp-h803-1303" } ], "unitPrinted": "Pa", "value": "10-7" } ] }, { "brand": "Seiko Instruments Inc.", "brandId": "brand:seiko-instruments", "family": "fam:tmp-maglev", "id": "pump:seiko-instruments-stp-ixa2205", "lifecycleState": "active", "name": "STP-iXA2205", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "°C", "value": "0 to 40" }, { "key": "bake_temp_max", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "19", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "magnetic bearing, 5 pairs of active magnetic bearings" }, { "key": "compression_h2", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "1×104" }, { "key": "compression_n2", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": ">108" }, { "key": "cooling", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "Water cooling" }, { "key": "inlet_flange", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "ISO250F/VG250/ICF305" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "Not necessary" }, { "key": "mass", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "kg", "value": "61" }, { "key": "max_foreline_pressure", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "Pa", "value": "266" }, { "key": "mounting_orientation", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "value": "Free" }, { "key": "noise_level", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "dB", "value": "<55" }, { "canonical": { "q": 1700, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "L/s", "value": "1700" }, { "canonical": { "q": 2200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "L/s", "value": "2200" }, { "key": "purge_flange", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "Pa·m3/s", "value": "8.4×10-2" }, { "key": "rotation_speed", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "startup_time", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "min", "value": "≤8" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "23", "source": "src:ptb-seiko-seiki-stp-ixa2205" } ], "unitPrinted": "Pa", "value": "10-7" } ] }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-1303", "lifecycleState": "active", "name": "TMP-1303", "parameters": [ { "key": "bake_temp_max", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "29", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "1 × 103" }, { "key": "compression_he", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "1 × 104" }, { "key": "compression_n2", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "6 × 108" }, { "key": "cooling", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "air (cooling fan)" }, { "key": "inlet_flange", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "ICF253 (Note 4)" }, { "key": "lubricant", "sources": [ { "page": "29", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "kg", "value": "34" }, { "key": "mounting_orientation", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "In any desired direction (Note 3)" }, { "canonical": { "q": 750, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "750" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "1050" }, { "canonical": { "q": 1300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "1300" }, { "key": "rotation_speed", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "rpm", "value": "30300" }, { "key": "service_interval", "sources": [ { "page": "59", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "min", "value": "7 minutes or less" }, { "canonical": { "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "36", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "Pa", "value": "10-8 Pa order" } ] }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-3203", "lifecycleState": "active", "name": "TMP-3203", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "°C", "value": "Operation : 0 to 40 °C / Storage : -25 to 70 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "23", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "1 × 104" }, { "key": "compression_he", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "3 × 105" }, { "key": "compression_n2", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "1 × 109 or more" }, { "key": "cooling", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "air (cooling fan)" }, { "key": "inlet_flange", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "VG350 (Note 5)" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "kg", "value": "70" }, { "key": "mounting_orientation", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "In any desired direction (Note 4)" }, { "canonical": { "q": 2400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "2400" }, { "canonical": { "q": 3000, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "3000" }, { "canonical": { "q": 3200, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "3200" }, { "key": "rotation_speed", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "rpm", "value": "21000" }, { "key": "service_interval", "sources": [ { "page": "53", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "min", "value": "13 minutes" }, { "canonical": { "q": 1.0000000000000001e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "Pa", "value": "10-9 Pa order" } ] }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "generation": "LM", "id": "pump:shimadzu-tmp-3203lm", "lifecycleState": "active", "name": "TMP-3203LM", "parameters": [], "series": "TMP", "sources": [ { "page": "1", "source": "src:tf-shimadzu-tmp-3203lm-manual" } ] }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-3403", "lifecycleState": "active", "name": "TMP-3403", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "°C", "value": "Operation : 0 to 40 °C / Storage : -25 to 70 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "23", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "6 × 104" }, { "key": "compression_he", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "1 × 105" }, { "key": "compression_n2", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "1 × 109" }, { "key": "cooling", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "VG350 (Note 4)" }, { "key": "lubricant", "sources": [ { "page": "23", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "kg", "value": "70" }, { "key": "mounting_orientation", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "In any desired direction (Note 3)" }, { "canonical": { "q": 2400, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "2400" }, { "canonical": { "q": 3100, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "3100" }, { "canonical": { "q": 3300, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "l/s", "value": "3300" }, { "key": "rotation_speed", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "rpm", "value": "22020" }, { "key": "service_interval", "sources": [ { "page": "53", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "min", "value": "15 minutes" }, { "canonical": { "q": 1e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "28", "source": "src:ptb-shimadzu-tmp-3203-3403" } ], "unitPrinted": "Pa", "value": "10-7 Pa order" } ] }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-403", "lifecycleState": "active", "name": "TMP-403", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "°C", "value": "Operation : 10 to 40 °C / Storage : -25 to 70 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "1 × 104" }, { "key": "compression_he", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "8 × 104" }, { "key": "compression_n2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "1 × 109" }, { "key": "cooling", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "air (cooling fan)" }, { "key": "inlet_flange", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "ICF203 (Note 6)" }, { "key": "lubricant", "sources": [ { "page": "27", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "kg", "value": "14" }, { "key": "mounting_orientation", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "In any desired direction (Note 7)" }, { "canonical": { "q": 340, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "l/s", "value": "340" }, { "canonical": { "q": 360, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "l/s", "value": "360" }, { "canonical": { "q": 420, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "l/s", "value": "420" }, { "key": "rotation_speed", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "rpm", "value": "45000" }, { "key": "service_interval", "sources": [ { "page": "55", "source": "src:ptb-shimadzu-tmp-403" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "min", "value": "5 minutes or less" }, { "canonical": { "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-403" } ], "unitPrinted": "Pa", "value": "10-8 Pa order" } ] }, { "brand": "Shimadzu", "brandId": "brand:shimadzu", "family": "fam:tmp-maglev", "id": "pump:shimadzu-tmp-803", "lifecycleState": "active", "name": "TMP-803", "parameters": [ { "key": "bake_temp_max", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "29", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "magnetic (radial + axial active maglev), touchdown backup bearings" }, { "key": "compression_h2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "4 × 103" }, { "key": "compression_he", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "8 × 104" }, { "key": "compression_n2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "1 × 109 or more" }, { "key": "cooling", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "air (cooling fan)" }, { "key": "inlet_flange", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "ICF203 (Note 4)" }, { "key": "lubricant", "sources": [ { "page": "29", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "none (dry, oil-free touchdown bearings)" }, { "key": "magnetic_field_max", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "mT", "value": "Radial 3 mT / Axial 15 mT" }, { "key": "mass", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "kg", "value": "32 kg or less" }, { "key": "mounting_orientation", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "In any desired direction (Note 3)" }, { "canonical": { "q": 700, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "700" }, { "canonical": { "q": 800, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "800" }, { "canonical": { "q": 800, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "l/s", "value": "800" }, { "key": "rotation_speed", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "rpm", "value": "35000" }, { "key": "service_interval", "sources": [ { "page": "59", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "value": "Annual overhaul is recommended" }, { "key": "startup_time", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "min", "value": "5 minutes or less" }, { "canonical": { "q": 1.0000000000000001e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "33", "source": "src:ptb-shimadzu-tmp-803-1303" } ], "unitPrinted": "Pa", "value": "10-9 Pa order" } ] }, { "brand": "Sumitomo Heavy Industries", "brandId": "brand:sumitomo", "family": "fam:cryo-gm", "id": "pump:sumitomo-marathon-cp-20", "lifecycleState": "unknown", "name": "Marathon CP-20 Cryopump", "parameters": [ { "key": "capacity_ar", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "std l", "value": "6000" }, { "key": "capacity_h2", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "std l", "value": "33" }, { "key": "cooldown_time", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "min", "value": "190" }, { "key": "crossover_value", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "torr-l", "value": "400" }, { "key": "inlet_flange", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "value": "ISO 500, claw type" }, { "key": "mass", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "kg", "value": "76" }, { "canonical": { "q": 8300, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "l/s", "value": "8300" }, { "canonical": { "q": 14000, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "l/s", "value": "14000" }, { "canonical": { "q": 29100, "unit": "l/s" }, "key": "pumping_speed_h2o", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "l/s", "value": "29100" }, { "canonical": { "q": 9900, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "l/s", "value": "9900" }, { "key": "refrigerator_type", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "value": "CH-210" }, { "key": "service_interval", "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ], "unitPrinted": "h", "value": "13000" } ], "sources": [ { "page": null, "source": "src:cryo-shi-sumitomo-marathon-cp-20-cryopump-operating-manual" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "generation": "E-series", "id": "pump:varian-turbo-v-1000-ice", "lifecycleState": "eol_unsupported", "name": "Turbo-V 1000 ICE", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "degC", "value": "+5°C to +35°C" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "degC", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "value": "2 x 10^5" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "value": "8 x 10^6" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "value": "5 x 10^9" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "water" }, { "key": "foreline_flange", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "KF 40 NW" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "ISO 200" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "kg", "value": "19" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "dB(A)", "value": "≤ 45" }, { "canonical": { "q": 900, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "l/s", "value": "900" }, { "canonical": { "q": 870, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "l/s", "value": "870" }, { "canonical": { "q": 950, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "l/s", "value": "950" }, { "key": "purge_gas_flow_max", "sources": [ { "page": "37", "source": "src:t3-v1000e" } ], "unitPrinted": "sccm", "value": "20" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "RPM", "value": "38000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "min", "value": "< 4" }, { "key": "storage_temp_range", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "degC", "value": "-20°C to +70°C" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v1000e" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "41", "source": "src:t3-v1000e" } ], "unitPrinted": "text", "value": "NW 10 KF (M8)" } ], "series": "Turbo-V", "sources": [ { "page": "2", "source": "src:t3-v1000e" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-1001-navigator", "lifecycleState": "eol_supported", "name": "Turbo-V 1001 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "°C", "value": "120 °C" }, { "key": "bearing_type", "sources": [ { "page": "50", "source": "src:t2-tv1001nav" } ], "value": "ceramic ball bearings (forevacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "1 x 10^6" }, { "key": "compression_he", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "1 x 10^7" }, { "key": "compression_n2", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "1 x 10^9" }, { "key": "cooling", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "Forced air or water" }, { "key": "inlet_flange", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "ISO 160, ISO 200, ISO 250, CF 10\"" }, { "key": "lubricant", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "53", "source": "src:t2-tv1001nav" } ], "unitPrinted": "kg", "value": "21.2" }, { "key": "mounting_orientation", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "dB(A)", "value": "<45 dB(A) at 1 meter" }, { "canonical": { "q": 920, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "l/s", "value": "920" }, { "canonical": { "q": 900, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "l/s", "value": "900" }, { "canonical": { "q": 1050, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "l/s", "value": "1050" }, { "key": "rotation_speed", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "rpm", "value": "38000" }, { "key": "startup_time", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "minutes", "value": "4 minutes" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "52", "source": "src:t2-tv1001nav" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-10 mbar" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-1001-sem", "lifecycleState": "eol_supported", "name": "Turbo-V 1001 SEM", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t2-tv1001sem" } ], "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "value": "ISO 200K, ISO 200F" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "kg", "value": "19" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "value": "Any" }, { "canonical": { "q": 900, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "l/s", "value": "900" }, { "canonical": { "q": 870, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "l/s", "value": "870" }, { "canonical": { "q": 950, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "l/s", "value": "950" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "rpm", "value": "38000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t2-tv1001sem" } ], "value": "does not require any maintenance" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t2-tv1001sem" } ], "unitPrinted": "min", "value": "< 4" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-141-navigator", "lifecycleState": "eol_supported", "name": "TV 141 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "28", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "permanently lubricated high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "8 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "8 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "3 x 10^8" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "integrated fan" }, { "key": "foreline_flange", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "KF 16 NW" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "ISO 100, ISO 63, CFF 6\"" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "32", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "kg", "value": "3.5" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "text", "value": "Any" }, { "canonical": { "q": 100, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "l/s", "value": "100" }, { "canonical": { "q": 120, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "l/s", "value": "120" }, { "canonical": { "q": 125, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "l/s", "value": "125" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "rpm", "value": "62000" }, { "key": "standby_power", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "W", "value": "15" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "seconds", "value": "< 90" }, { "canonical": { "bound": "less_than", "q": 2e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "mbar", "value": "< 2 x 10^-10" }, { "key": "vibration_level", "sources": [ { "page": "31", "source": "src:t2-tv141navrs485" } ], "unitPrinted": "µm", "value": "< 0.01" } ], "series": "Turbo-V" }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-150ht", "lifecycleState": "eol_unsupported", "name": "Turbo-V 150HT", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "°C", "value": "+ 5° C to + 35° C" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "°C", "value": "120° C max." }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v150ht" } ], "value": "high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "8 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "8 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "3 x 10^8" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "Forced air or water" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "ISO 100, ISO 63, CFF 6\", CFF 4.5”" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "kg", "value": "5.6" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "value": "Any" }, { "canonical": { "q": 110, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "l/s", "value": "110" }, { "canonical": { "q": 120, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "l/s", "value": "120" }, { "canonical": { "q": 130, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "l/s", "value": "130" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "rpm", "value": "62000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "seconds", "value": "< 90 seconds" }, { "canonical": { "bound": "less_than", "q": 2e-10, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v150ht" } ], "unitPrinted": "mbar", "value": "< 2 x 10^-10 mbar (< 1.5 x 10^-10 Torr)" }, { "key": "venting_flange", "sources": [ { "page": "40", "source": "src:t3-v150ht" } ], "value": "NW 10 KF (M8)" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-1800a", "lifecycleState": "eol_unsupported", "name": "Turbo-V 1800A", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "°C", "value": "+5°C to +35°C" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v1800a" } ], "value": "ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "ratio", "value": "6000" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "ratio", "value": "250000" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "ratio", "value": ">1 x 10^10" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "ISO 250" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "kg", "value": "62" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "Vertical/inverted" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "dB(A)", "value": "≤52" }, { "canonical": { "q": 1750, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "l/s", "value": "1750" }, { "canonical": { "q": 1850, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "l/s", "value": "1850" }, { "canonical": { "q": 1600, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "l/s", "value": "1600" }, { "key": "purge_flange", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "KF 10 NW" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "rpm", "value": "27000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t3-v1800a" } ], "value": "no maintenance required" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "min", "value": "10" }, { "canonical": { "q": 9.999177631578947e-11, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "unitPrinted": "Torr", "value": "7.5e-11" }, { "key": "venting_flange", "sources": [ { "page": "31", "source": "src:t3-v1800a" } ], "value": "KF 10 NW" } ], "series": "Turbo-V" }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-2000-ice", "lifecycleState": "eol_unsupported", "name": "Turbo-V 2000 ICE", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "29", "source": "src:t3-v2000ice" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v2000ice" } ], "value": "high precision ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "value": "Water" }, { "key": "inlet_flange", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "value": "CFF 12\" O.D." }, { "key": "mass", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "kg", "value": "55" }, { "key": "mounting_orientation", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "value": "Any" }, { "canonical": { "q": 1500, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "l/s", "value": "1500" }, { "canonical": { "q": 2000, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "l/s", "value": "2000" }, { "canonical": { "q": 1950, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "l/s", "value": "1950" }, { "key": "rotation_speed", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "rpm", "value": "33000" }, { "key": "rotor_temp_max", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "°C", "value": "120" }, { "key": "startup_time", "sources": [ { "page": "32", "source": "src:t3-v2000ice" } ], "unitPrinted": "minutes", "value": "12" }, { "key": "venting_flange", "sources": [ { "page": "41", "source": "src:t3-v2000ice" } ], "value": "NW 10 KF (M8)" } ], "series": "Turbo-V" }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-250", "lifecycleState": "eol_unsupported", "name": "Turbo-V 250", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v250" } ], "value": "high precision ceramic ball bearings, permanently lubricated" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "ratio", "value": "1 x 10^4" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "ratio", "value": "1 x 10^5" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "ratio", "value": "2 x 10^8" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "value": "Natural air convection; forced air or water cooling optional" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "value": "DN 100 CFF (6\" O.D.)" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "kg", "value": "11.4" }, { "key": "mounting_orientation", "sources": [ { "page": "28", "source": "src:t3-v250" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "dB(A)", "value": "45" }, { "canonical": { "q": 200, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "l/s", "value": "200" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "l/s", "value": "250" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "rpm", "value": "56000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "minutes", "value": "< 3" }, { "canonical": { "q": 2e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v250" } ], "unitPrinted": "mbar", "value": "2 x 10^-10" } ], "series": "Turbo-V", "sources": [ { "page": "2", "source": "src:t3-v250" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-250sf", "lifecycleState": "eol_unsupported", "name": "Turbo-V 250SF", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "permanently lubricated high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "value": "2 x 10^3" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "value": "7 x 10^3" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "value": "1 x 10^7" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "Natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "CFF 6\" O.D., ISO 100" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "kg", "value": "5.5" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "dB(A)", "value": "45" }, { "canonical": { "q": 200, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "l/s", "value": "200" }, { "canonical": { "q": 220, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "l/s", "value": "220" }, { "canonical": { "q": 250, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "l/s", "value": "250" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "RPM", "value": "56000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "min", "value": "< 3" }, { "canonical": { "q": 2e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v250sf" } ], "unitPrinted": "mbar", "value": "2 x 10^-10" }, { "key": "venting_flange", "sources": [ { "page": "41", "source": "src:t3-v250sf" } ], "unitPrinted": "text", "value": "NW 10 KF" } ], "series": "Turbo-V" }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-2k-g", "lifecycleState": "eol_unsupported", "name": "Turbo-V 2K-G", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "°C", "value": "+5 to +40" }, { "key": "bearing_type", "sources": [ { "page": "74", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "ISO 250 F" }, { "key": "lubricant", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "kg", "value": "35" }, { "key": "mounting_orientation", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "dB(A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "W", "value": "400" }, { "canonical": { "q": 1400, "unit": "l/s" }, "key": "pumping_speed_ar", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "l/s", "value": "1400" }, { "canonical": { "q": 1600, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "l/s", "value": "1600" }, { "key": "purge_flange", "sources": [ { "page": "99", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "1/8 NPT thread or Swagelok connector" }, { "key": "rotation_speed", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "rpm", "value": "33000" }, { "key": "rotor_temp_max", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "°C", "value": "120" }, { "key": "standby_power", "sources": [ { "page": "76", "source": "src:t3-tv-2kg" } ], "unitPrinted": "W", "value": "30 to 35" }, { "key": "startup_time", "sources": [ { "page": "75", "source": "src:t3-tv-2kg" } ], "unitPrinted": "minutes", "value": "< 7" }, { "key": "venting_flange", "sources": [ { "page": "99", "source": "src:t3-tv-2kg" } ], "unitPrinted": "text", "value": "1/8 NPT thread or Swagelok connector" } ], "series": "Turbo-V" }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "generation": "Navigator", "id": "pump:varian-turbo-v-301", "lifecycleState": "eol_supported", "name": "Turbo-V 301 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "°C", "value": "+5° C to +35° C" }, { "key": "bake_temp_max", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "°C", "value": "120° C" }, { "key": "bearing_type", "sources": [ { "page": "74", "source": "src:t2-tv301nav" } ], "value": "high precision ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "value": "Natural air convection / Forced air or water optional" }, { "key": "inlet_flange", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "value": "CFF 8\" O.D. / ISO 160" }, { "key": "lubricant", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "kg", "value": "8" }, { "key": "mounting_orientation", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "dB(A)", "value": "≤ 45 dB (A) at 1 meter" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "l/s", "value": "210" }, { "canonical": { "q": 230, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "l/s", "value": "230" }, { "canonical": { "q": 280, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "l/s", "value": "280" }, { "key": "purge_flange", "sources": [ { "page": "95", "source": "src:t2-tv301nav" } ], "value": "KF16" }, { "key": "rotation_speed", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "rpm", "value": "56000" }, { "key": "startup_time", "sources": [ { "page": "75", "source": "src:t2-tv301nav" } ], "unitPrinted": "minutes", "value": "< 3 minutes" }, { "key": "venting_flange", "sources": [ { "page": "95", "source": "src:t2-tv301nav" } ], "value": "NW 10 KF / M8" } ], "series": "Turbo-V", "sources": [ { "page": "2", "source": "src:tf-varian-turbo-v-301-manual" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-401-301-ms", "lifecycleState": "eol_supported", "name": "TV 401/301 MS", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "°C", "value": "+5 °C to +35 °C" }, { "key": "bake_temp_max", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "208", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "permanently lubricated ceramic ball bearings" }, { "key": "compression_h2_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "6 x 10^4" }, { "key": "compression_h2_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "7 x 10^3" }, { "key": "compression_he_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "1.4 x 10^5" }, { "key": "compression_he_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "1.4 x 10^4" }, { "key": "compression_n2_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "> 3 x 10^8" }, { "key": "compression_n2_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "1 x 10^6" }, { "key": "cooling", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "Natural air convection; forced air or water optional" }, { "key": "inlet_flange", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "DN 100" }, { "key": "lubricant", "sources": [ { "page": "211", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "211", "source": "src:t2-tv401-301" } ], "unitPrinted": "kg", "value": "5.8" }, { "key": "mounting_orientation", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "dB (A)", "value": "≤ 45" }, { "key": "power_max", "sources": [ { "page": "211", "source": "src:t2-tv401-301" } ], "unitPrinted": "W", "value": "150" }, { "canonical": { "q": 210, "unit": "l/s" }, "key": "pumping_speed_h2_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "210" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_h2_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 300, "unit": "l/s" }, "key": "pumping_speed_he_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "300" }, { "canonical": { "q": 380, "unit": "l/s" }, "key": "pumping_speed_he_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "380" }, { "canonical": { "q": 310, "unit": "l/s" }, "key": "pumping_speed_n2_main_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "310" }, { "canonical": { "q": 400, "unit": "l/s" }, "key": "pumping_speed_n2_side_port", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "l/s", "value": "400" }, { "key": "rotation_speed", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "rpm", "value": "60000" }, { "key": "service_interval", "sources": [ { "page": "203", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "no maintenance required" }, { "key": "startup_time", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "min", "value": "< 3" }, { "canonical": { "bound": "less_than", "q": 7.000000000000001e-10, "restatedInSource": { "count": 1, "spread": 1 }, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "210", "source": "src:t2-tv401-301" } ], "unitPrinted": "text", "value": "< 7 x 10^-10 mbar (< 5.25 x 10^-10 Torr)" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-550", "lifecycleState": "eol_unsupported", "name": "Turbo-V 550", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v550" } ], "value": "ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "value": "Natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "value": "CFF 8\" O.D." }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "kg", "value": "18" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "dB(A)", "value": "≤45" }, { "canonical": { "q": 510, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "l/s", "value": "510" }, { "canonical": { "q": 600, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "l/s", "value": "600" }, { "canonical": { "q": 550, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "l/s", "value": "550" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "RPM", "value": "42000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v550" } ], "unitPrinted": "min", "value": "<3" } ], "series": "Turbo-V", "sources": [ { "page": "28", "source": "src:t3-v550" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-551-navigator", "lifecycleState": "eol_supported", "name": "TV 551 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "31", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "ISO 160" }, { "key": "lubricant", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "kg", "value": "19.4" }, { "key": "mounting_orientation", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "dB(A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "32", "source": "src:t3-v551-701" } ], "unitPrinted": "W", "value": "325" }, { "canonical": { "q": 510, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "510" }, { "canonical": { "q": 600, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "600" }, { "canonical": { "q": 550, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "550" }, { "key": "rotation_speed", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "rpm", "value": "42000" }, { "key": "rotor_temp_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "120" }, { "key": "startup_time", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "minutes", "value": "< 5" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-6000", "lifecycleState": "eol_unsupported", "name": "Turbo-V 6000", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "upper: double ceramic ball bearing; lower: double stainless steel ball bearing (oil lubricated)" }, { "key": "cooling", "sources": [ { "page": "30", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "water" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "ISO 500 / 20” I.D. Wheeler" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "Varian T.A. oil" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "kg", "value": "250" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "Vertical (max slope 10°)" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "dB(A)", "value": "≤ 55" }, { "canonical": { "q": 6500, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "l/s", "value": "6500" }, { "canonical": { "q": 7000, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "l/s", "value": "7000" }, { "canonical": { "q": 6000, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "l/s", "value": "6000" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "rpm", "value": "14000" }, { "key": "service_interval", "sources": [ { "page": "37", "source": "src:t3-v6000" } ], "unitPrinted": "months", "value": "6" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "minutes", "value": "30" }, { "key": "venting_flange", "sources": [ { "page": "31", "source": "src:t3-v6000" } ], "unitPrinted": "text", "value": "KF 10 NW" } ], "series": "Turbo-V", "sources": [ { "page": "30", "source": "src:t3-v6000" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-70", "lifecycleState": "eol_unsupported", "name": "Turbo-V 70", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "high precision ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "Natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "CF 4.5\" O.D." }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "kg", "value": "1.6" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "dB(A)", "value": "45" }, { "canonical": { "q": 45, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "l/s", "value": "45" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "l/s", "value": "60" }, { "canonical": { "q": 68, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "l/s", "value": "68" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "RPM", "value": "75000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t3-v70" } ], "unitPrinted": "text", "value": "maintenance-free" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v70" } ], "unitPrinted": "seconds", "value": "< 60" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-700ht", "lifecycleState": "eol_unsupported", "name": "Turbo-V 700HT", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "permanently lubricated high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "2 x 10^6" }, { "key": "compression_he", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "1 x 10^7" }, { "key": "compression_n2", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": ">1 x 10^9" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "Natural air convection" }, { "key": "foreline_flange", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "KF 25 NW" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "CFF 10\" O.D. / ISO 200" }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "kg", "value": "14 (ISO) / 20.1 (CFF)" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "dB(A)", "value": "≤ 45" }, { "canonical": { "q": 510, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "l/s", "value": "510" }, { "canonical": { "q": 620, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "l/s", "value": "620" }, { "canonical": { "q": 690, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "l/s", "value": "690" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "rpm", "value": "42000" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "minutes", "value": "< 5" }, { "key": "storage_temperature", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "°C", "value": "-20 to +70" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "31", "source": "src:t3-v700ht" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-10" } ], "series": "Turbo-V", "sources": [ { "page": "1", "source": "src:t3-v700ht" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-701-navigator", "lifecycleState": "eol_supported", "name": "TV 701 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "31", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "ceramic ball bearings" }, { "key": "inlet_flange", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "ISO 200" }, { "key": "lubricant", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "kg", "value": "19.4" }, { "key": "mounting_orientation", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "dB(A)", "value": "< 45" }, { "key": "power_max", "sources": [ { "page": "32", "source": "src:t3-v551-701" } ], "unitPrinted": "W", "value": "350" }, { "canonical": { "q": 510, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "510" }, { "canonical": { "q": 620, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "620" }, { "canonical": { "q": 690, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "l/s", "value": "690" }, { "key": "rotation_speed", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "rpm", "value": "42000" }, { "key": "rotor_temp_max", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "°C", "value": "120" }, { "key": "startup_time", "sources": [ { "page": "32", "source": "src:t2-v551-701nav" } ], "unitPrinted": "minutes", "value": "< 5" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-70d", "lifecycleState": "eol_unsupported", "name": "Turbo-V 70D", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "30", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "high precision ceramic ball bearings" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "Natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "CF 4.5\" O.D." }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "kg", "value": "1.6" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "dB (A)", "value": "45" }, { "canonical": { "q": 20, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "l/s", "value": "20" }, { "canonical": { "q": 30, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "l/s", "value": "30" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "l/s", "value": "60" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "rpm", "value": "75000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t3-v70d" } ], "unitPrinted": "text", "value": "does not require any maintenance" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v70d" } ], "unitPrinted": "s", "value": "< 60" } ], "series": "Turbo-V" }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-70lp", "lifecycleState": "eol_unsupported", "name": "Turbo-V 70LP", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "28", "source": "src:t3-v70lp" } ], "unitPrinted": "°C", "value": "+5 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "°C", "value": "120" }, { "key": "cooling", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "value": "natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "value": "CF 4.5\" O.D." }, { "key": "lubricant", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "kg", "value": "2.5" }, { "key": "mounting_orientation", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "value": "any" }, { "key": "noise_level", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "dB(A)", "value": "45" }, { "canonical": { "q": 45, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "l/s", "value": "45" }, { "canonical": { "q": 60, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "l/s", "value": "60" }, { "canonical": { "q": 68, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "l/s", "value": "68" }, { "key": "rotation_speed", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "RPM", "value": "75000" }, { "key": "service_interval", "sources": [ { "page": "29", "source": "src:t3-v70lp" } ], "value": "maintenance-free (no maintenance required)" }, { "key": "startup_time", "sources": [ { "page": "31", "source": "src:t3-v70lp" } ], "unitPrinted": "seconds", "value": "< 60" } ], "series": "Turbo-V", "sources": [ { "page": "2", "source": "src:t3-v70lp" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-801-navigator", "lifecycleState": "eol_supported", "name": "TV 801 Navigator Bolted Flange", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "°C", "value": "+10 to +45" }, { "key": "bake_temp_max", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "210", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "permanently lubricated high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "2 x 10^6" }, { "key": "compression_he", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "5 x 10^7" }, { "key": "compression_n2", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": ">1 x 10^9" }, { "key": "cooling", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "Forced air" }, { "key": "foreline_flange", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "KF 25" }, { "key": "inlet_flange", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "ISO 160 F" }, { "key": "lubricant", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "213", "source": "src:t2-tv801nav" } ], "unitPrinted": "kg", "value": "27" }, { "key": "mounting_orientation", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "text", "value": "Any" }, { "key": "noise_level", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "dB(A)", "value": "< 55" }, { "canonical": { "q": 850, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "l/s", "value": "850" }, { "canonical": { "q": 810, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "l/s", "value": "810" }, { "canonical": { "q": 680, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "l/s", "value": "680" }, { "key": "rotation_speed", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "rpm", "value": "38000" }, { "key": "startup_time", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "minutes", "value": "< 4" }, { "canonical": { "bound": "less_than", "q": 1e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "212", "source": "src:t2-tv801nav" } ], "unitPrinted": "mbar", "value": "< 1 x 10^-10" } ], "series": "Turbo-V" }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-81", "lifecycleState": "eol_unsupported", "name": "Turbo-V 81", "parameters": [], "sources": [ { "page": "75", "source": "src:t3-v81ag" }, { "page": "94", "source": "src:t3-v81ag" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "generation": "M", "id": "pump:varian-turbo-v-81-m", "lifecycleState": "eol_unsupported", "name": "Turbo-V 81-M", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "°C", "value": "+5°C to +25°C" }, { "key": "bake_temp_max", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "196", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "permanently lubricated, high precision ceramic ball bearings (forevacuum side)" }, { "key": "compression_h2", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "value": "7 x 10^3" }, { "key": "compression_he", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "value": "8 x 10^4" }, { "key": "compression_n2", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "value": "3 x 10^8" }, { "key": "cooling", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "natural air convection (forced air or water optional)" }, { "key": "inlet_flange", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "ISO 63" }, { "key": "lubricant", "sources": [ { "page": "199", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "199", "source": "src:t3-v81m" } ], "unitPrinted": "kg", "value": "1.99" }, { "key": "mounting_orientation", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "dB(A)", "value": "≤ 45" }, { "key": "power_max", "sources": [ { "page": "199", "source": "src:t3-v81m" } ], "unitPrinted": "W", "value": "50" }, { "canonical": { "q": 50, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "l/s", "value": "50" }, { "canonical": { "q": 65, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "l/s", "value": "65" }, { "canonical": { "q": 77, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "l/s", "value": "77" }, { "key": "rotation_speed", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "Hz", "value": "1350" }, { "key": "startup_time", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "s", "value": "< 60" }, { "canonical": { "q": 5e-10, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "198", "source": "src:t3-v81m" } ], "unitPrinted": "mbar", "value": "5 x 10^-10" } ], "series": "Turbo-V", "sources": [ { "page": "1", "source": "src:t3-v81m" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-classic", "id": "pump:varian-turbo-v-81-t", "lifecycleState": "eol_unsupported", "name": "Turbo-V 81-T", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "°C", "value": "+5 to +25" }, { "key": "bake_temp_max", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "°C", "value": "120" }, { "key": "bearing_type", "sources": [ { "page": "196", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "permanently lubricated ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "ratio", "value": "3 x 10^2" }, { "key": "compression_he", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "ratio", "value": "5 x 10^3" }, { "key": "compression_n2", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "ratio", "value": "> 7 x 10^6" }, { "key": "cooling", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "natural air convection" }, { "key": "inlet_flange", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "ISO 63" }, { "key": "lubricant", "sources": [ { "page": "199", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "permanent lubrication" }, { "key": "mass", "sources": [ { "page": "199", "source": "src:t3-v81t" } ], "unitPrinted": "kg", "value": "1.83" }, { "key": "mounting_orientation", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "text", "value": "any" }, { "key": "noise_level", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "dB(A)", "value": "≤ 45" }, { "key": "power_max", "sources": [ { "page": "199", "source": "src:t3-v81t" } ], "unitPrinted": "W", "value": "50" }, { "canonical": { "q": 50, "unit": "l/s" }, "key": "pumping_speed_h2", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "l/s", "value": "50" }, { "canonical": { "q": 65, "unit": "l/s" }, "key": "pumping_speed_he", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "l/s", "value": "65" }, { "canonical": { "q": 77, "unit": "l/s" }, "key": "pumping_speed_n2", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "l/s", "value": "77" }, { "key": "rotation_speed", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "Hz", "value": "1350" }, { "key": "startup_time", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "s", "value": "< 60" }, { "canonical": { "q": 5e-9, "unit": "mbar" }, "key": "ultimate_pressure", "sources": [ { "page": "198", "source": "src:t3-v81t" } ], "unitPrinted": "mbar", "value": "5 x 10^-9" } ], "series": "Turbo-V", "sources": [ { "page": "1", "source": "src:t3-v81t" } ] }, { "brand": "Varian Vacuum", "brandId": "brand:varian", "family": "fam:tmp-hybrid", "id": "pump:varian-turbo-v-902", "lifecycleState": "eol_unsupported", "name": "TV 902 Navigator", "parameters": [ { "key": "ambient_temp_range", "sources": [ { "page": "258", "source": "src:t3-tv902" } ], "unitPrinted": "°C", "value": "+10 to +35" }, { "key": "bake_temp_max", "sources": [ { "page": "258", "source": "src:t3-tv902" } ], "unitPrinted": "°C", "value": "80" }, { "key": "bearing_type", "sources": [ { "page": "255", "source": "src:t3-tv902" } ], "unitPrinted": "text", "value": "permanently lubricated high precision ceramic ball bearings" }, { "key": "compression_h2", "sources": [ { "page": "258", "source": "src:t3-tv902" } ], "unitPrinted": "text", "value": "1 x 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