Invarvalues describe: Invar 36
Semiconductor equipment & lithographyBig science (accelerators, light sources, public fusion)Space test
Why it wins
Near-zero expansion iron: metrology frames, laser resonators, mask and reticle structures, optical benches that must not breathe with temperature.
Why not the alternative
Stainless moves 10x more per kelvin; ULE and Zerodur are glass, not structure.
Watch out
Ferromagnetic, rusts, welds shift its CTE locally.
Properties
The values below are candidate: compiled from the sources named, not yet individually validated.
Provisional provenance: ASM Handbook: properties, corrosion, heat treatment; NIST cryogenic material properties database; Kurt J. Lesker materials notes.
Wet cleaning
| Recipe | degrease, DI rinse, dry immediately |
|---|
| Forbidden | aqueous soaking: it rusts |
|---|
| Limit | stress relief after machining matters more than cleaning |
Vacuum and outgassing
| Outgassing, unbaked (10 h) | 3e-9 mbar·L/s/cm² |
|---|
| Outgassing, baked | 2e-11 mbar·L/s/cm² |
|---|
| Vapour pressure | negligible |
Temperature
| Bake, assembled | 230 °C |
|---|
| Vacuum degas | 830 °C |
|---|
| Braze / H2 firing | 1000 °C |
|---|
| Metallurgical limit | Curie 230 °C: the anomaly ends there |
Thermal
| CTE | 1.5 ppm/K |
|---|
| Thermal conductivity | 13 W/m·K |
|---|
| Specific heat | 515 J/kg·K |
|---|
| Emissivity | 0.2–0.3 |
|---|
| Melting / softening | 1427 °C |
Mechanical
| Strength | 275 ys MPa |
|---|
| Tensile | 450–500 MPa |
|---|
| Elongation | 30 % |
|---|
| Young's modulus | 141 GPa |
|---|
| Hardness | 130–150 HV |
|---|
| Density | 8.1 g/cm3 |
Electrical and magnetic
| Relative permeability | ferromagnetic |
|---|
| Resistivity | 82 µΩ·cm |
Engineering
| Corrosion | moderate; rusts, usually plated |
|---|
| Joining | weldable; the expansion match is lost at the weld |
|---|
| Process notes | stress-relieve after machining or it moves |
|---|
| Availability and cost | stock, moderate premium |
Grades
| Invar 36 (K93600, 1.3912) | the standard low-CTE grade |
|---|
| Super Invar | lower CTE still, narrower temperature window |
Sources · 2
- O Hanlon, A Users Guide to Vacuum Technology
- Kurt Lesker materials notes
← The Matter