Ceramics and glasses · Workhorse

Pyrolytic boron nitride

PBNvalues describe: PBN

Semiconductor equipment & lithographyBig science (accelerators, light sources, public fusion)

Why it wins

The crucible of epitaxy: CVD-grown, binder-free, nothing to outgas into an MBE melt. Effusion cells, coating boats, high purity liners.

Why not the alternative

Graphite crucibles shed carbon into III-V melts; alumina reacts with aggressive charges.

Watch out

Anisotropic: strong in plane, cleaves between layers.

Properties

The values below are candidate: compiled from the sources named, not yet individually validated. Provisional provenance: CoorsTek, CeramTec, Kyocera technical ceramic data.

Wet cleaning

Recipesolvent wipe and dry only
Forbiddenaqueous cleaning of a heater assembly: any trapped moisture is fatal at power
Limitthe CVD deposit is pore-free, so cleaning is a wipe, not a process

Vacuum and outgassing

Outgassing, unbaked (10 h)5e-10 mbar·L/s/cm²
Outgassing, baked5e-13 mbar·L/s/cm²
Vapour pressurenone

Temperature

Bake, assembled450 °C
Vacuum degas1400 °C
Braze / H2 firing1600 °C
Metallurgical limitstable to 2000 °C in vacuum or inert

Thermal

CTE1.0 in-plane, 20 through ppm/K
Thermal conductivity60 in-plane, 2 through W/m·K
Specific heat800 J/kg·K
Emissivity0.9
Melting / softening2973 sub. °C

Mechanical

Strength150–200 flex MPa
Elongationnil
Young's modulus25–50 GPa
Density2.15 g/cm3

Electrical and magnetic

Relative permeability1.0
Resistivity>1e14 Ω·cm
Dielectric strength50–100 kV/mm

Engineering

Corrosioninert; unlike hot-pressed BN it is not hygroscopic
Joiningclamped or CVD-integrated with graphite heaters
Process notesthe pore-free crystalline form; do not confuse it with hot-pressed BN
Availability and costMomentive, to drawing

Grades

PBN (CVD)effusion cells and liners
PBN/PG composite heatersintegrated heater-crucible stacks
Sources · 1
  1. Momentive PBN data

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