Films and getters · Future bench (tested)

Quaternary NEG films (TiZrHfV)

TiZrHfVvalues describe: TiZrHfV

Big science (accelerators, light sources, public fusion)

What it enables

Lower activation temperature than TiZrV: NEG pumping on even less bakeable systems.

Status and pusher

Validated by XPS and pumping tests, baselined for chambers of the HALF light source in Hefei. Pushed by the Chinese light source program on the CERN lineage.

Properties

The values below are candidate: compiled from the sources named, not yet individually validated. Provisional provenance: CERN vacuum group compilations and coating programme; SAES Getters datasheets and NEG literature.

Wet cleaning

Recipesubstrate cleaned before coating; the film is never wet-cleaned
Forbiddenventing cycles beyond the qualified count
Limitactivation capacity

Vacuum and outgassing

Outgassing, unbaked (10 h)pumps
Outgassing, bakedpumps
Vapour pressurenone

Temperature

Bake, assembled200 °C
Vacuum degas200 °C
Metallurgical limitactivation 150–180 °C, lower than TiZrV

Thermal

CTEsubstrate
Thermal conductivitysubstrate

Mechanical

Strengthcoating
Elongationnil
Density~6 g/cm3

Electrical and magnetic

Relative permeability~1.0

Engineering

Joiningsputtered in situ
Process notesthe hafnium lowers activation further
Availability and costresearch and pilot installations
Sources · 1
  1. TiZrHfV activation by XPS, NIM-A

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