Reference

Vacuum Regime Abacus

Pick a pressure. See the pumps, gauges, and seals that work there. Every range is ported from The Vacuum Stack.

Example the abacus opens at 8.72e-6 Torr, the middle of its span, and lights the 9 ranges of 16 that cover it. Move the cursor or enter a value and this note goes away.

Pressure 8.72e-6 Torr

Or enter a value Torr

Drag the line, or click anywhere on the chart, to set the pressure.

Pumps

Rotary vane (oil-sealed) [B] 760 → 1e-3 Torr

Scroll / diaphragm / screw (dry) [B] 760 → 1e-3 Torr

Roots (lobe booster) [B] 10 → 1e-2 Torr

Turbomolecular [B] 1e-3 → 1e-10 Torr

Diffusion [C] 1e-5 → 7.5e-11 Torr

Cryopump [C] 1e-6 → 7.5e-10 Torr

Sputter ion pump [B] 7.5e-3 → 1e-11 Torr · orig mbar (start)

Titanium sublimation (TSP) [C] 7.5e-6 → 7.5e-13 Torr · orig mbar

Gauges

Capacitance manometer (Baratron) [A] 1000 → 7.5e-7 Torr · orig Pa and Torr

Pirani [A] 75 → 7.5e-4 Torr · orig Pa

Thermocouple [C] 10 → 1e-3 Torr

Penning (cold cathode) [A] 7.5e-3 → 7.5e-10 Torr · orig Pa

Bayard-Alpert (hot cathode) [A] 7.5e-3 → 1.5e-11 Torr · orig mbar

Extractor (e.g. IE514) [A] 7.5e-5 → 1.5e-12 Torr · orig mbar

Seals

OFHC copper (ConFlat) [B] 760 → 1e-13 Torr

Silver-plated copper (ConFlat) [B] 760 → 1e-13 Torr

Qualitative range

Items whose Stack entry does not give a numeric bound. Shown for completeness, not driven by the cursor.

Non-evaporable getter (NEG) Pump [A]

ultimate <7.5e-13 Torr (from <1e-12 mbar). No numeric upper bound stated in the Stack.

Lower bound per-pump [A] Benvenuti et al., Vacuum (ScienceDirect). The §1 master abacus UHV row lists NEG among UHV pumps but does not assign 1e-8 Torr to NEG specifically.
Viton O-ring (KF/ISO) Seal [C]

atm to high vacuum

[C] HVACO link (KF/ISO use elastomer O-rings). No numeric lower bound in the file.
Viton CF gasket Seal [B]

down to ~UHV edge

[B] MKS. No numeric lower bound in the file.
Spinning rotor (SRG) Gauge [A]

high vacuum (calibration reference)

[A] Cornell/USPAS. Field abacus row gives no numeric range, only "high vacuum".

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