Ceramics and glasses · Workhorse

Aluminum nitride and Shapal

AlNvalues describe: high-grade AlN

Semiconductor equipment & lithographyVacuum electronics & X-ray sourcesQuantum hardware

Why it wins

The insulator that conducts heat: ESC bodies and heaters, laser diode mounts, anywhere alumina would cook.

Why not the alternative

Alumina conducts 25 to 30 W per meter kelvin; AlN runs 170 plus. BeO beats it but carries the toxicity file.

Watch out

Hydrolyzes slowly in hot water chemistry; metallization less mature than alumina.

Properties

The values below are candidate: compiled from the sources named, not yet individually validated. Provisional provenance: Slack, thermal conductivity of AlN, 1973; CoorsTek, CeramTec, Kyocera technical ceramic data.

Wet cleaning

Recipesolvent wipe and dry; if aqueous is unavoidable, brief, buffered, and dried immediately
Forbiddenwater: AlN + 3H₂O → Al(OH)₃ + NH₃; wet machining without an inhibitor
Limithydrolysis, which makes this the one ceramic where the wet step is the risk

Vacuum and outgassing

Outgassing, unbaked (10 h)1e-9 mbar·L/s/cm²
Outgassing, baked1e-12 mbar·L/s/cm²
Vapour pressurenone

Temperature

Bake, assembled450 °C
Vacuum degas1000 °C
Braze / H2 firing1200 °C
Metallurgical limitdissociates ~2200 °C; oxidises in air above 800 °C

Thermal

CTE4.5 ppm/K
Thermal conductivity170–200 polycrystalline, 285–320 single crystal W/m·K
Specific heat740 J/kg·K
Emissivity0.8
Melting / softening2200 dec. °C

Mechanical

Strength300–350 flex MPa
Elongationnil
Young's modulus330 GPa
Hardness1100–1200 HV
Density3.26 g/cm3

Electrical and magnetic

Relative permeability1.0
Resistivity>1e13 Ω·cm
Dielectric strength14–17 kV/mm

Engineering

Corrosionhydrolyses in humid air
Joiningactive-alloy brazed or metallised
Process notesShapal is the machinable grade at lower κ
Availability and costMaruwa, Tokuyama, Precision Ceramics

Brazing

Sourced pairings

WithFillerAtmosphereExpansion gap at set
Oxygen-free copper C10100 / C10200 / Kovar (FeNiCo) / Nickel and nickel plating / Austenitic stainless 304L / 316L / 316LN ESR / Titanium Gr 2 / Ti-6Al-4V / refractories (unspecified)Ticusilvacuum 1e-5 mm Hg or inert gas0.97 % at 780 °C
Oxygen-free copper C10100 / C10200 on the outside
over budget
Oxygen-free copper C10100 / C10200
one built object
microwave absorber module of the Material Plasma Exposure eXperiment: an array of pyramidal AlN tiles brazed onto a water-cooled Glidcop AL-15 baseplate explosion-bonded to a 316SS plate, eight modules and two cooled flanges welded into a stainless cage to make the complete absorber. Two test articles were built and exposed to an electron beam.
Cusin-1 ABAnot stated by the source0.97 % at 775 °C
Oxygen-free copper C10100 / C10200 on the outside
over budget
copper, grade not stated by the source
one built object
higher order mode absorber for the 1.3 GHz nine cell superconducting cavity of an energy recovery linac: an AlN cylinder brazed inside a copper cylinder whose inner face carries lattice-like slots, with stainless flanges electron beam welded at both ends. A first prototype was built in 2017 and a second after the tests.
named only in prose: silver, and no more. Table 2 of the paper prints Brazing material Silver, which names a metal and not an alloy of this catalogue.vacuumno filler identified, nothing to derive

Preparation

  • none

Chemical affinity

What documents state about a BINARY SYSTEM, one element of a filler metal faced with one element of this material. An affinity is not a verdict on a joint: a joint brings many binaries together at once, some helpful and some harmful, and what follows is the list of those the corpus can name. The count below is not written anywhere. It falls out of the crossing of this material's elements with the composition of every filler the corpus holds, so it grows on its own the day a binary enters the corpus.

Elements of this material: Al N, from the chemical name.

interfacial reaction that wets9 fillersTi against N1 source+1 statement

The two elements react at the interface and the product of that reaction is what the rest of the filler wets. This is the mechanism that makes active metal brazing work, and it is the only one of the six that a joint wants.

On a nitride ceramic, titanium in the filler forms a thin titanium nitride layer at the interface, and that layer is what the filler wets.wantedTi against N

9 fillers: 35Au-62Cu-2Ti-1Ni, 48Ti-48Zr-4Be, 49Ti-49Cu-2Be, 56Zr-28V-16Ti, 71.5Ti-28.5Ni, Cusil-ABA, Cusin-1 ABA, Incusil-ABA, Ticusil

Conditions and verbatim

Printed page 862, aluminum nitride section. The article states that sufficient wetting of AlN can be obtained with commercial Ag-Cu brazes that contain a low weight percent of titanium by brazing above 800 C, citing Ref 106 and 107, and that a thin titanium nitride layer is formed at the interface. The temperature carried here is that floor of 800 C and it is stated for AlN with a silver-copper braze, not for the Ti-N system in general. The same paragraph adds that successful copper-titanium braze joints require more than 7 weight percent titanium to achieve enough wetting with aluminum nitride at 1150 C, a second condition the corpus does not carry as a value because it belongs to a filler this corpus does not hold.

Characteristic temperature800 °C, Joining, in Engineered Materials Handbook Desk Edition, M. M. Gauthier editor, ASM International, 1995, pages 846 to 864, DOI 10.31399/asm.hb.emde.a0003056

Source[A] Joining, in Engineered Materials Handbook Desk Edition, M. M. Gauthier editor, ASM International, 1995, pages 846 to 864, DOI 10.31399/asm.hb.emde.a0003056

Source conditionsHandbook article, consulted as a PDF whose printed page numbers run 846 to 864. The article is itself a digest of the Ceramics and Glasses volume 4 of the Engineered Materials Handbook, so its statements are second-hand summaries of the papers it cites by Ref number. The Ref numbers are kept in the conditions of each entry, because a reader who wants the primary measurement needs them.

Grades

AlN 170 W/mKstandard substrate grade
AlN 200 to 230 W/mKpremium thermal grade for ESC and heaters
Shapal Hi-M Softmachinable AlN: prototypes without hard tooling
Sources · 2
  1. Tokuyama Shapal data
  2. Precision Ceramics AlN data

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