Ceramics and glasses · Workhorse

Alumina 94 to 99.8 percent

Al2O3values describe: 99.5 %

Vacuum electronics & X-ray sourcesBig science (accelerators, light sources, public fusion)Semiconductor equipment & lithographyQuantum hardwareVacuum equipment & components

Why it wins

The default vacuum ceramic: strong, brazeable via Mo-Mn metallization plus Ni plating and AgCu eutectic, holds tens of kV, bakeable past 450 C. Feedthroughs, RF windows, tube envelopes, ESC dielectrics.

Why not the alternative

Glass is weaker and thermally fragile; AlN costs more and is chosen when thermal conductivity is the spec.

Watch out

Brittle; every joint needs CTE matching (Kovar, Ti); metallization quality decides tube lifetime.

Properties

The values below are candidate: compiled from the sources named, not yet individually validated. Provisional provenance: CoorsTek, CeramTec, Kyocera technical ceramic data; Electron tube and ceramic-to-metal sealing practice; CERN Accelerator School, vacuum and materials proceedings.

Wet cleaning

Recipesolvent degrease, DI rinse, then fire 900–1000 °C in air to burn organics off the grain boundaries
ForbiddenHF and hot alkali; ultrasonics on metallised parts
Limitgrain-boundary porosity holds water, so the fire is the real clean

Vacuum and outgassing

Outgassing, unbaked (10 h)1e-9 mbar·L/s/cm²
Outgassing, baked1e-12 mbar·L/s/cm²
Vapour pressurenone

Temperature

Bake, assembled450 °C
Vacuum degas1200 °C
Braze / H2 firing1500 °C
Metallurgical limitservice to 1700 °C

Thermal

CTE7.6 ppm/K
Thermal conductivity30 W/m·K
Specific heat880 J/kg·K
Emissivity0.7–0.9
Melting / softening2072 °C

Mechanical

Strength350–380 flex MPa
Elongationnil
Young's modulus370 GPa
Hardness1400–1800 HV
Density3.9 g/cm3

Electrical and magnetic

Relative permeability1.0
Resistivity>1e14 Ω·cm
Dielectric strength15–17 kV/mm; tan δ 2e-4 at 1 MHz

Engineering

Corrosioninert except to HF and hot alkali
JoiningMo-Mn metallised at 1400–1550 °C in wet H₂, then brazed
Process notesground, not machined; the metallising defines the joint
Availability and costCeramTec, CoorsTek, Kyocera, to drawing

Brazing

Sourced pairings

WithFillerAtmosphereExpansion gap at set
Kovar (FeNiCo)Cusilvacuum or H2 (brazing), wet H2 (metallisation)0.28 % at 780 °C
Kovar (FeNiCo) on the outside
undetermined
Kovar (FeNiCo)Ticusilvacuum 1e-5 mm Hg or inert gas0.28 % at 780 °C
Kovar (FeNiCo) on the outside
undetermined
Niobium RRR 300BCu-1vacuum0.03 % at 1084.62 °C
Alumina 94 to 99.8 percent on the outside
matched
Oxygen-free copper C10100 / C10200Cusilvacuum0.90 % at 780 °C
Oxygen-free copper C10100 / C10200 on the outside
over budget
Austenitic stainless 304L / 316L / 316LN ESRPalcusil 15vacuum, H2 or inert gas1.10 % at 850 °C
Austenitic stainless 304L / 316L / 316LN ESR on the outside
over budget
Titanium Gr 2 / Ti-6Al-4VCusilvacuumexpansion of side B absent: 780 °C is outside the range of titanium-grade-2 (20 to 700 °C), never extrapolated
Oxygen-free copper C10100 / C10200 / Nickel and nickel plating / Kovar (FeNiCo)Incusil 15vacuum0.67 % at 605 °C
Oxygen-free copper C10100 / C10200 on the outside
over budget
Niobium RRR 300
one built object
ASTM F19 tensile buttons simulating the braze geometry of a sealed component, Sandia National Laboratories: 94 and 96 percent alumina active-brazed to an explosively bonded niobium-copper interlayer 0.5 mm thick
35Au-62Cu-2Ti-1Nihigh vacuum, below 1.3e-3 Pa at brazing temperatureexpansion of side A absent: 1015 °C falls between 1000 and 1026.85 °C on alumina, a junction between two sources that disagree, never interpolated across
Graphite, pyrolytic graphite, glassy carbon
one built object
multistage depressed collector of a traveling-wave tube, NASA Lewis Research Center: isotropic graphite electrodes joined to alumina insulators
Ticusilvacuum furnace0.14 % at 780 °C
Alumina 94 to 99.8 percent on the outside
undetermined
Graphite, pyrolytic graphite, glassy carbon
one built object
multistage depressed collector of a 500-W continuous-wave 4.8 to 9.6 GHz traveling-wave tube, NASA Lewis Research Center: graphite electrodes brazed to alumina insulators
BCu-1hydrogen atmosphere furnace0.39 % at 1084.62 °C
Alumina 94 to 99.8 percent on the outside
undetermined
Kovar (FeNiCo)
one built object
MC 2935 Kovar header assembly and its pin, The Bendix Corporation, Kansas City Division: a metallized alumina insulator brazed to a Kovar pin and header to form a vacuum-tight electrical feedthrough
Nicusil 3dry hydrogenset temperature absent: no solidus recorded for ag-cu-ni-nicusil-3
Kovar (FeNiCo)
one built object
ASTM F19 tensile buttons of 94 percent alumina with Fe-29Ni-17Co interlayers, Sandia National Laboratories, brazed by three methods compared side by side: molybdenum-manganese metallization with nickel plate, thin-film PVD metallization, and active filler metal brazing
Cusil or 35Au/65Cu or Incusil-ABA or Cusil-ABA or 97Ag-1Cu-2Zr or 35Au-62Cu-2Ti-1Nidry hydrogen on the metallized and thin-film routes, vacuum or partial-pressure argon on the active route0.28 % at 780 °C
Kovar (FeNiCo) on the outside
undetermined
Niobium RRR 300
one built object
ASTM F19 tensile buttons of 94 percent alumina direct-brazed to niobium with conventional filler metals and no surface modification, Sandia National Laboratories
named only in prose: three conventional filler metals, 62Cu-35Au-3Ni, 92Au-8Pd and 50Au-50Cu. None of the three is carried by this catalog, and none is substituted.vacuumno filler identified, nothing to derive
Kovar (FeNiCo)
one built object
ASTM F19 tensile buttons and flush-mount cylinder assemblies of alumina ceramic active-brazed to Kovar interlayers, Sandia National Laboratories, testing conformal ALD alumina coatings against braze filler metal run-out
97Ag-1Cu-2Zroil-free, top-loading, cryogenic-pumped high-vacuum furnace, typical absolute pressures 5e-7 to 1e-6 torr during the peak brazing soak, monitored on a NIST-traceable ionization gaugeset temperature absent: no solidus recorded for ag-cu-zr-97-1-2
Niobium RRR 300
one built object
bulb-type sealed samples of a thermionic converter envelope: alumina ceramic rings and refractory metal end caps, sealed and then evaluated for vacuum integrity under thermal shock, ageing and caesium vapour
pure vanadiumvacuum, the ageing being run at 10-7 to 10-8 torrset temperature absent: no solidus recorded for v-pur
Niobium RRR 300
one built object
ceramic-to-metal seals for a thermionic converter programme, built to run in caesium vapour: yttria-fluxed alumina metallized with tungsten and joined to columbium metal, the name this 1967 text uses for niobium
palladiumvacuum or inert, not stated by the source for the brazing stepset temperature absent: no solidus recorded for pd-pur
copper, grade not stated by the source
one built object
high-power klystrons built at the W. W. Hansen Laboratories of Stanford University for the 200-foot-long linear accelerator: alumina metallized with the sintered metal powder process, nickel-plated, and brazed to copper components
Cusilnot stated by the sourceexpansion of side B absent: material not in the curve set
Molybdenum and TZM
one built object
high-temperature ceramic-to-metal seals developed at the North American Philips Laboratories: high-purity alumina joined to molybdenum through a spongy molybdenum layer and a refractory alloy wetting agent, the technique also reported for magnesia and spinel sealed to molybdenum, tungsten and rhenium
named only in prose: not fixed by the source. The chapter writes that the final brazing operation is by conventional means, that the choice of the filler metal determines the temperature resistance of the seal, and that preformed washers of Ru/Mo or Rh/Mo oxides may be used, or any of the filler metals for high-temperature operation discussed in its chapter 13. No one filler is named for this seal and none is written.wet hydrogen for the spongy layer, hydrogen for the wetting agent, and an inert atmosphere for the service the result is stated inno filler identified, nothing to derive
Kovar (FeNiCo)
stated as a pairing
named only in prose: not named by the table. Table 15.1 varies the METALLIZING MIXTURE and its sintering temperature, and the braze that attaches the Kovar to the metallized specimen is not printed.not stated by the sourceno filler identified, nothing to derive

Preparation

  • Mo-Mn 80/20 fired 1500 C under wet H2, coating 0.025-0.038 mm, Ni plating 0.003 mm refired 1000 C
  • no metallisation
  • none
  • Mo-Mn then Ni plating
  • 15 C/min to 975 C with a 10 minute soak, then 10 C/min to the peak temperature and its soak, then 25 C/min back to 975 C and 15 C/min to ambient
  • the Ticusil foil placed in direct contact with the graphite surface on a tapered joint interface, with a slight pressure applied at the interface during brazing to obtain a void-free joint. On this joint the alumina is UNMETALLIZED.
  • the graphite is metallized with a molybdenum, manganese and silica powder slurry brush-painted, dried and fired at 1600 C in dry hydrogen to form carbides with the graphite, the alumina ring is metallized on both its inner and outer circumferential surfaces, a thin copper coating overlaid on the graphite serves as the filler and protects the metallization from oxidation. Both brazes, Kovar to alumina and alumina to graphite, are made in a single operation.
  • molybdenum-manganese metallization fired in wet hydrogen, then nickel plating, electrolytic from a nickel-chloride solution or electroless nickel-boron, the two compared with no difference in tensile strength attributable to either, brazing cycle of 10 minutes at 55 C above the liquidus, the parts placed into a preheated furnace and cooled in a water-cooled hydrogen-purged chamber
  • for the metallized route, a coating of molybdenum, sometimes tungsten, and manganese particles mixed with silicates and glass additives, fired in wet hydrogen at 1450 to 1600 C to leave a glassy metallic coating 300 to 500 micro-inches thick, then plated with 0.001 to 0.003 inch of nickel sinter-fired at 850 to 950 C in hydrogen. For the thin-film route, a PVD titanium layer 0.05 to 0.25 micrometres thick under a noble over-layer of gold, platinum or palladium 0.25 to 1.0 micrometres thick.
  • alumina cleaned in a three-step solvent process then resintered either in wet hydrogen at a 28 C dew point, 1500 C for 60 minutes, or air-fired at 1575 C for 120 minutes, Kovar pickled in deionized water and hydrochloric acid then bright-dipped in an acetic, nitric and hydrochloric solution, joint preload about 30 g per square centimetre, part of the Kovar carries a conformal ALD alumina coating of 1 to 20 nm. Cycle: 15 C/min to 925 C with a 15 minute soak, 10 C/min to 985 C with a 5 minute soak, 25 C/min back to 925 C, then furnace cool.
  • a molybdenum or a tungsten barrier vacuum-evaporated onto the ceramic before brazing
  • tungsten metallizing. Pure alumina with an addition of one half to 2 per cent yttria is coated with a suspension of 17 volume per cent tungsten powder in 83 volume per cent water, and the coating is sintered at 1700 C. The chapter prints the four reactions Cowan, Stoddard and Herrick summarise, ending with a final firing temperature of approximately 1700 C being necessary to densify the tungsten and cause the mixture of tungsten, yttrium tungstate and yttria to coalesce into a hard, dense structure.
  • three metallizing paint formulations are printed on book page 447 and all three are used at the same laboratory, the document saying of them together that these compositions have been successfully used for a number of years at the W. W. Hansen Laboratories of Stanford University. PAINT NO. 5A, Eitel-McCullough, Inc., Report No. 7 of 1954, under contract AF33(600)-17125, Reliable Ceramic Tubes Adapted for Automatic Production: 176 g molybdenum powder at 400 mesh, 44 g manganese, MD 301 of the Metals Disintegrating Co., Inc., Elizabeth, N. J., 55 ml acetone, 25 ml methyl ethyl ketone, 50 ml Cellosolve of the Carbide Carbon Chemical Co., and 45 ml nitrocellulose lacquer of 600 to 1000 seconds. PAINT NO. 10A, Eitel-McCullough, Inc., Report No. 9 of 1954, under the same contract: 176 g molybdenum powder at 200 mesh, 44 g manganese powder at 200 mesh, 9 g titanium hydride, 45 ml nitrocellulose lacquer of 600 to 1000 seconds, 25 ml methyl ethyl ketone, 50 ml Cellosolve, which the document glosses as ethyl ether, and 55 ml acetone. PAINT NO. 2A, and this one the document attributes to the W. W. Hansen Laboratories of Stanford University themselves: 200 g molybdenum powder at 400 mesh, 40 g manganese powder at 400 mesh, 10 g hydrogen-reduced iron powder, 2 g silica in the form of silicic acid as a fine powder, 2 g calcium oxide at 200 mesh or finer, 50 ml nitrocellulose lacquer of 600 to 1000 seconds, 55 ml acetone, 30 ml methyl ethyl ketone and 50 ml Cellosolve. THE LACQUER ITSELF is prepared by mixing the following ingredients in the order shown: 400 g nitrocellulose, 1650 ml toluene, 750 ml ethyl alcohol or methyl ketone, 600 ml ethyl acetate. THE PROCESS: after ball-milling for 100 hours the paint is applied by brushing and sintered at the specified temperature, a second coating is superimposed and treated in the same manner, and the metallized area is then nickel-plated. WHICH PAINT ON WHICH BODY: Paint No. 5A is preferred for metallizing 94 per cent alumina that is then fired at 1525 C, which the document marks Tb, and for bodies of higher alumina content Paints 10A and 2A are being used. HANDLING, printed on book pages 445 and 446 and carried here because it conditions the bond: the ceramics must not be touched by bare hands after the cleaning operation has been performed, and they should be stored in heated, dust-free cabinets before use. Clean ceramics must not come into contact with any metal parts during handling, tweezers, spatulas and other tools should be bone-tipped or coated with plastic, and ceramic or fused-silica trays must be used during furnace treatment.
  • a spongy layer of molybdenum formed on the ceramic by reducing a suspension of MoO3 in an amyl acetate and nitrocellulose solution, brushed on and reduced in wet hydrogen for 10 minutes at 1700 C or higher, higher sintering temperatures and higher humidity and longer firing times producing better results. Then a refractory alloy wetting agent of 40 weight per cent RuO2 and 60 weight per cent MoO3 in the same solution, brushed onto the spongy layer and reduced to metal by firing in hydrogen for a few minutes at 1300 C or higher.
  • seven metallizing mixtures formulated at the Sperry Gyroscope Company, sintered between 1300 and 1600 C. Composition 65, 292.5 g Mo and 7.5 g Ti at 1500 C. Composition 91, 270 g Mo and 30 g LiMnO3 at 1500 C. Composition 141, 291 g Mo and 9 g talc MgO-SiO2 at 1600 C. Composition 72, 240 g Mo and 73.6 g CeO2 at 1500 C. Composition 50, 255 g Mo and 48 g SiO2 and 22 g Mn, at 1300 C on one body and 1500 C on another. Composition 49, 255 g Mo and 48 g SiO2 and 26 g MnO at 1500 C.

Compatibility

What documents state about this material faced with a filler metal, without the other member of the joint. A statement that names the exact filler comes first. A statement about a whole AWS class comes after it: a class covers dozens of alloys, so it is the weaker of the two, and the corpus never turns one into the other.

  • reacts71.5Ti-28.5Ni

    Kohl states that a very brittle intermetallic compound Ti2Ni forms in Ni/Ti active alloy seals once the eutectic composition of 28.5 nickel to 71.5 titanium is exceeded toward the nickel-rich side, and also toward the titanium-rich side, or when the sealing temperature drops below 955 C.

    [A]Walter H. Kohl, Handbook of Materials and Techniques for Vacuum Devices, chapter 15, Ceramic-to-Metal Sealing, pages 441 to 474, AIP Press, American Institute of Physics, New York, 1995 reprint of the Van Nostrand Reinhold edition of 1967, American Vacuum Society classics series, ISBN 1-56396-387-6, call number TK7871.72 .K64 1995

    Conditions and source

    Book page 453. The passage reads: It is important that the excessive formation of brittle phases be avoided during the sealing operation. This requires very careful temperature control and judicious proportioning of the alloy components. In the case of Ni/Ti active alloy seals, a very brittle intermetallic compound Ti2Ni is formed when the optimum eutectic composition of 28.5:71.5 Ni/Ti is exceeded toward the Ni-rich side on the phase diagram, or, for that matter, also when the composition moves toward the Ti-rich side, or when the sealing temperature drops below 955 C. THE MEASUREMENT THAT ESTABLISHES IT is printed on the same page, from Wisser and Hagadorn, who placed stacked rings of Ti and Ni of different thicknesses between two abutting cylinders of 96 per cent alumina ceramics and heated them to 1070 C for three minutes: Photomicrographs taken of seal sections disclose the presence of small cracks for a composition containing 32.1 per cent Ni and extensive cracks for a 35 per cent Ni-alloy. To obtain consistently good seals, it is recommended that the Ni content not exceed 28.5 per cent. THE REMEDY IS PRINTED TOO, on page 454: the authors also introduced massive titanium seals where a relatively thick Ti ring is used with a thin Ni washer on each side, so that the Ti/Ni alloy formed always remains on the Ti-rich side of the eutectic composition 28.5/71.5. WHY THE VERDICT IS reacts AND NOT proscribed OR attacks. The document names a reaction product and the composition window in which it appears, and it does not instruct anyone to avoid the filler, which would be proscribed, nor does it describe the filler eroding or dissolving the alumina, which would be attacks. The material of this entry is the alumina because that is the ceramic of the measurement, the 96 per cent alumina cylinders of Wisser and Hagadorn. The portee is stated and not derived-from-class because the corpus filler entered at this lot IS the eutectic the sentence names.

  • listedCusil-ABA
    Schwartz reports Cusil ABA used as a titanium-containing filler metal to join alumina of 94 and 99 plus percent, over a brazing temperature range of 820 to 860 C.
    Conditions and source

    Book page 128, unnumbered table under the sentence that titanium-containing filler metals were used to join both 94 and 99 plus percent Al2O3 compositions. The alumina grades named match the corpus alumina entry, which covers technical alumina 94 to 99.8 percent. The sentence names no partner metal, and the figure that follows on the same page shows copper contacts, which is not recorded here because the sentence itself does not say it. The second filler of the same table, Incusil 10 ABA, is not written because the corpus carries Incusil-ABA under another name and another composition, and the two products are not established to be the same.

    [A]M. M. Schwartz, Brazing, 2nd edition, ASM International, 2003, chapter 4, Base Metals and Base-Metal Family Groups, DOI 10.1361/brse2003p063

    Chapter 4 of the second edition, book pages 63 to 162 in the copy read, which treats base metals family by family and states metallurgical reactions, atmosphere limits and filler selection guides. It is a handbook chapter, not a qualification record. The page of each statement is carried by the entry that uses it, never by this registry line.

Chemical affinity

What documents state about a BINARY SYSTEM, one element of a filler metal faced with one element of this material. An affinity is not a verdict on a joint: a joint brings many binaries together at once, some helpful and some harmful, and what follows is the list of those the corpus can name. The count below is not written anywhere. It falls out of the crossing of this material's elements with the composition of every filler the corpus holds, so it grows on its own the day a binary enters the corpus.

Elements of this material: Al O, from the chemical name.

interfacial reaction that wets9 fillersTi against O1 source+1 statement

The two elements react at the interface and the product of that reaction is what the rest of the filler wets. This is the mechanism that makes active metal brazing work, and it is the only one of the six that a joint wants.

On an oxide ceramic, titanium in the filler reacts with the surface to form TiO or Ti2O3, and the rest of the filler wets that layer. Adhesion is appreciably higher where the product is TiO.wantedTi against O

9 fillers: 35Au-62Cu-2Ti-1Ni, 48Ti-48Zr-4Be, 49Ti-49Cu-2Be, 56Zr-28V-16Ti, 71.5Ti-28.5Ni, Cusil-ABA, Cusin-1 ABA, Incusil-ABA, Ticusil

Conditions and verbatim

Printed page 857, section on active metal brazing. The article states that titanium is the most extensively studied and widely used active element addition to filler metals formulated to directly braze high-melting oxide ceramics, citing Ref 37 to 41, and that the critical interfacial reaction product in the case of oxide ceramics brazed with titanium-containing filler metals is either TiO or Ti2O3, with appreciably higher adhesion in systems that result in the formation of TiO, citing Ref 42. The article gives no temperature for this reaction and none is written here.

Source[A] Joining, in Engineered Materials Handbook Desk Edition, M. M. Gauthier editor, ASM International, 1995, pages 846 to 864, DOI 10.31399/asm.hb.emde.a0003056

Source conditionsHandbook article, consulted as a PDF whose printed page numbers run 846 to 864. The article is itself a digest of the Ceramics and Glasses volume 4 of the Engineered Materials Handbook, so its statements are second-hand summaries of the papers it cites by Ref number. The Ref numbers are kept in the conditions of each entry, because a reader who wants the primary measurement needs them.

Grades

94 percent (A-94)the metallization grade: Mo-Mn bonds to the glassy phase, standard feedthroughs
97.6 percentbalance of brazability and dielectric performance
99.5 to 99.8 percenthigh voltage and low RF loss windows: less glassy phase, harder to metallize
Sources · 2
  1. CERN Accelerator School, vacuum proceedings
  2. O Hanlon, A Users Guide to Vacuum Technology

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